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- W2040852285 abstract "Boron segregation toward implanted arsenic profile in Si during annealing was investigated under various annealing conditions. It is found that both the implant damage created by the arsenic implantation and arsenic deactivation enhance the diffusion of the embedded boron layer toward the shallow As implanted profile. This phenomena was found in both 650 degree Celsius furnace annealed (FA) and 1000 degree Celsius rapid thermally annealed (RTA) samples. For the 650 degree Celsius FA sample, the boron segregation peak was found located at the junction formed by implanted As, where residual dislocation loops at the original amorphous/crystalline (A/C) interface was also observed. However, no A/C interface dislocation loops were found to be present for the RTA samples. Additional anomalous boron segregation was observed for the 1000 degree Celsius RTA plus 750 degree Celsius FA samples. The additional boron segregation is not correlated with defect layers. It is, therefore, concluded that the anomalous boron segregation is caused by the electric field resulting from the formation of p-n junction." @default.
- W2040852285 created "2016-06-24" @default.
- W2040852285 creator A5034198402 @default.
- W2040852285 creator A5062176679 @default.
- W2040852285 creator A5077989333 @default.
- W2040852285 creator A5082656873 @default.
- W2040852285 creator A5086875357 @default.
- W2040852285 date "1997-08-27" @default.
- W2040852285 modified "2023-09-27" @default.
- W2040852285 title "Boron segregation in As-implanted Si due to electric field and transient enhanced diffusion" @default.
- W2040852285 doi "https://doi.org/10.1117/12.284604" @default.
- W2040852285 hasPublicationYear "1997" @default.
- W2040852285 type Work @default.
- W2040852285 sameAs 2040852285 @default.
- W2040852285 citedByCount "0" @default.
- W2040852285 crossrefType "proceedings-article" @default.
- W2040852285 hasAuthorship W2040852285A5034198402 @default.
- W2040852285 hasAuthorship W2040852285A5062176679 @default.
- W2040852285 hasAuthorship W2040852285A5077989333 @default.
- W2040852285 hasAuthorship W2040852285A5082656873 @default.
- W2040852285 hasAuthorship W2040852285A5086875357 @default.
- W2040852285 hasConcept C113196181 @default.
- W2040852285 hasConcept C121332964 @default.
- W2040852285 hasConcept C145148216 @default.
- W2040852285 hasConcept C178790620 @default.
- W2040852285 hasConcept C185592680 @default.
- W2040852285 hasConcept C191897082 @default.
- W2040852285 hasConcept C192562407 @default.
- W2040852285 hasConcept C2777855556 @default.
- W2040852285 hasConcept C41823505 @default.
- W2040852285 hasConcept C43617362 @default.
- W2040852285 hasConcept C501308230 @default.
- W2040852285 hasConcept C502230775 @default.
- W2040852285 hasConcept C544956773 @default.
- W2040852285 hasConcept C56052488 @default.
- W2040852285 hasConcept C6425155 @default.
- W2040852285 hasConcept C8010536 @default.
- W2040852285 hasConcept C97355855 @default.
- W2040852285 hasConceptScore W2040852285C113196181 @default.
- W2040852285 hasConceptScore W2040852285C121332964 @default.
- W2040852285 hasConceptScore W2040852285C145148216 @default.
- W2040852285 hasConceptScore W2040852285C178790620 @default.
- W2040852285 hasConceptScore W2040852285C185592680 @default.
- W2040852285 hasConceptScore W2040852285C191897082 @default.
- W2040852285 hasConceptScore W2040852285C192562407 @default.
- W2040852285 hasConceptScore W2040852285C2777855556 @default.
- W2040852285 hasConceptScore W2040852285C41823505 @default.
- W2040852285 hasConceptScore W2040852285C43617362 @default.
- W2040852285 hasConceptScore W2040852285C501308230 @default.
- W2040852285 hasConceptScore W2040852285C502230775 @default.
- W2040852285 hasConceptScore W2040852285C544956773 @default.
- W2040852285 hasConceptScore W2040852285C56052488 @default.
- W2040852285 hasConceptScore W2040852285C6425155 @default.
- W2040852285 hasConceptScore W2040852285C8010536 @default.
- W2040852285 hasConceptScore W2040852285C97355855 @default.
- W2040852285 hasLocation W20408522851 @default.
- W2040852285 hasOpenAccess W2040852285 @default.
- W2040852285 hasPrimaryLocation W20408522851 @default.
- W2040852285 hasRelatedWork W2009252896 @default.
- W2040852285 hasRelatedWork W2048269824 @default.
- W2040852285 hasRelatedWork W2063677047 @default.
- W2040852285 hasRelatedWork W2065258228 @default.
- W2040852285 hasRelatedWork W2065669148 @default.
- W2040852285 hasRelatedWork W2074173678 @default.
- W2040852285 hasRelatedWork W2088081281 @default.
- W2040852285 hasRelatedWork W2091143923 @default.
- W2040852285 hasRelatedWork W2275386326 @default.
- W2040852285 hasRelatedWork W2546785496 @default.
- W2040852285 isParatext "false" @default.
- W2040852285 isRetracted "false" @default.
- W2040852285 magId "2040852285" @default.
- W2040852285 workType "article" @default.