FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2040877479> ?p ?o ?g. }

• W2040877479 endingPage "1533" @default.
• W2040877479 startingPage "1530" @default.
• W2040877479 abstract "Sensitive curvature measurements were performed on 40 Å period W/C multilayer structures on Si substrates using a two beam laser reflection technique. A compressive stress of approximately 1530 MPa was measured in these sputtered multilayer films. Thermal annealing to 500 °C resulted in very little strain relaxation in the multilayers but x-ray diffraction data show a slight increase of the multilayer period. Significant strain relaxation, though, was observed when a 400 Å W buffer layer was included. Thermal annealing of these samples to 400–500 °C resulted in large strain relaxation due to the growth of α-W crystals in the buffer layer. Large oxide formation on air annealed samples did not significantly change the strain state of the films." @default.
• W2040877479 created "2016-06-24" @default.
• W2040877479 creator A5001249709 @default.
• W2040877479 creator A5001538910 @default.
• W2040877479 creator A5007312185 @default.
• W2040877479 creator A5021809926 @default.
• W2040877479 creator A5081949075 @default.
• W2040877479 date "1994-02-01" @default.
• W2040877479 modified "2023-09-26" @default.
• W2040877479 title "Film stress of sputtered W/C multilayers and strain relaxation upon annealing" @default.
• W2040877479 cites W1965477774 @default.
• W2040877479 cites W1965774002 @default.
• W2040877479 cites W1966180009 @default.
• W2040877479 cites W1969138092 @default.
• W2040877479 cites W1973174091 @default.
• W2040877479 cites W1974726872 @default.
• W2040877479 cites W1976351724 @default.
• W2040877479 cites W1982667708 @default.
• W2040877479 cites W1990187735 @default.
• W2040877479 cites W2007415015 @default.
• W2040877479 cites W2016139406 @default.
• W2040877479 cites W2023536906 @default.
• W2040877479 cites W2029948207 @default.
• W2040877479 cites W2051533317 @default.
• W2040877479 cites W2058323562 @default.
• W2040877479 cites W2078483217 @default.
• W2040877479 cites W2085953068 @default.
• W2040877479 cites W2093596305 @default.
• W2040877479 doi "https://doi.org/10.1063/1.356390" @default.
• W2040877479 hasPublicationYear "1994" @default.
• W2040877479 type Work @default.
• W2040877479 sameAs 2040877479 @default.
• W2040877479 citedByCount "15" @default.
• W2040877479 countsByYear W20408774792012 @default.
• W2040877479 countsByYear W20408774792015 @default.
• W2040877479 countsByYear W20408774792019 @default.
• W2040877479 countsByYear W20408774792020 @default.
• W2040877479 crossrefType "journal-article" @default.
• W2040877479 hasAuthorship W2040877479A5001249709 @default.
• W2040877479 hasAuthorship W2040877479A5001538910 @default.
• W2040877479 hasAuthorship W2040877479A5007312185 @default.
• W2040877479 hasAuthorship W2040877479A5021809926 @default.
• W2040877479 hasAuthorship W2040877479A5081949075 @default.
• W2040877479 hasConcept C113196181 @default.
• W2040877479 hasConcept C120665830 @default.
• W2040877479 hasConcept C121332964 @default.
• W2040877479 hasConcept C149912024 @default.
• W2040877479 hasConcept C15744967 @default.
• W2040877479 hasConcept C159985019 @default.
• W2040877479 hasConcept C171250308 @default.
• W2040877479 hasConcept C185592680 @default.
• W2040877479 hasConcept C19067145 @default.
• W2040877479 hasConcept C192562407 @default.
• W2040877479 hasConcept C202974441 @default.
• W2040877479 hasConcept C207114421 @default.
• W2040877479 hasConcept C22423302 @default.
• W2040877479 hasConcept C2776029896 @default.
• W2040877479 hasConcept C2777855556 @default.
• W2040877479 hasConcept C43617362 @default.
• W2040877479 hasConcept C50515024 @default.
• W2040877479 hasConcept C77805123 @default.
• W2040877479 hasConcept C8010536 @default.
• W2040877479 hasConceptScore W2040877479C113196181 @default.
• W2040877479 hasConceptScore W2040877479C120665830 @default.
• W2040877479 hasConceptScore W2040877479C121332964 @default.
• W2040877479 hasConceptScore W2040877479C149912024 @default.
• W2040877479 hasConceptScore W2040877479C15744967 @default.
• W2040877479 hasConceptScore W2040877479C159985019 @default.
• W2040877479 hasConceptScore W2040877479C171250308 @default.
• W2040877479 hasConceptScore W2040877479C185592680 @default.
• W2040877479 hasConceptScore W2040877479C19067145 @default.
• W2040877479 hasConceptScore W2040877479C192562407 @default.
• W2040877479 hasConceptScore W2040877479C202974441 @default.
• W2040877479 hasConceptScore W2040877479C207114421 @default.
• W2040877479 hasConceptScore W2040877479C22423302 @default.
• W2040877479 hasConceptScore W2040877479C2776029896 @default.
• W2040877479 hasConceptScore W2040877479C2777855556 @default.
• W2040877479 hasConceptScore W2040877479C43617362 @default.
• W2040877479 hasConceptScore W2040877479C50515024 @default.
• W2040877479 hasConceptScore W2040877479C77805123 @default.
• W2040877479 hasConceptScore W2040877479C8010536 @default.
• W2040877479 hasIssue "3" @default.
• W2040877479 hasLocation W20408774791 @default.
• W2040877479 hasOpenAccess W2040877479 @default.
• W2040877479 hasPrimaryLocation W20408774791 @default.
• W2040877479 hasRelatedWork W1524042703 @default.
• W2040877479 hasRelatedWork W1993390188 @default.
• W2040877479 hasRelatedWork W2013102666 @default.
• W2040877479 hasRelatedWork W2017776647 @default.
• W2040877479 hasRelatedWork W2037469635 @default.
• W2040877479 hasRelatedWork W2321690658 @default.
• W2040877479 hasRelatedWork W2380293314 @default.
• W2040877479 hasRelatedWork W2970254463 @default.
• W2040877479 hasRelatedWork W3082440218 @default.
• W2040877479 hasRelatedWork W4312430631 @default.
• W2040877479 hasVolume "75" @default.
• W2040877479 isParatext "false" @default.
• W2040877479 isRetracted "false" @default.

• next