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- W2040883421 abstract "We investigated the durability of CrO<SUB>x</SUB>F<SUB>y</SUB> film, which is used as a shifter for attenuated phase-shift masks (Att- PSMs), under ArF excimer laser irradiation. The phase shift of an as-deposited film decreased and the transmittance increased due to the disappearance of interfaces, which was caused by the migration of atoms. To improve durability, the sample was annealed at 300 degrees C to remove the interfaces, and the surface was etched to recover the decreased transmittance caused by the annealing. As a result, the lifetime became 1.5 years, which is sufficient for practical devices. The depth-of-focus of an ArF photoresist was 1.2 micrometers for a 0.13 micrometers line-and-space pattern and 0.5 micrometers for an 0.13 micrometers isolated contact- hole pattern when Att-PSMs made from CrO<SUB>x</SUB>F<SUB>y</SUB> film were used." @default.
- W2040883421 created "2016-06-24" @default.
- W2040883421 creator A5004661487 @default.
- W2040883421 creator A5005110163 @default.
- W2040883421 creator A5005159122 @default.
- W2040883421 creator A5021889272 @default.
- W2040883421 creator A5029579123 @default.
- W2040883421 creator A5077380899 @default.
- W2040883421 creator A5081277438 @default.
- W2040883421 date "2000-07-19" @default.
- W2040883421 modified "2023-09-23" @default.
- W2040883421 title "CrOxFy as a material for attenuated phase-shift masks in ArF lithography" @default.
- W2040883421 doi "https://doi.org/10.1117/12.392100" @default.
- W2040883421 hasPublicationYear "2000" @default.
- W2040883421 type Work @default.
- W2040883421 sameAs 2040883421 @default.
- W2040883421 citedByCount "2" @default.
- W2040883421 crossrefType "proceedings-article" @default.
- W2040883421 hasAuthorship W2040883421A5004661487 @default.
- W2040883421 hasAuthorship W2040883421A5005110163 @default.
- W2040883421 hasAuthorship W2040883421A5005159122 @default.
- W2040883421 hasAuthorship W2040883421A5021889272 @default.
- W2040883421 hasAuthorship W2040883421A5029579123 @default.
- W2040883421 hasAuthorship W2040883421A5077380899 @default.
- W2040883421 hasAuthorship W2040883421A5081277438 @default.
- W2040883421 hasConcept C105487726 @default.
- W2040883421 hasConcept C111337013 @default.
- W2040883421 hasConcept C120665830 @default.
- W2040883421 hasConcept C121332964 @default.
- W2040883421 hasConcept C134406635 @default.
- W2040883421 hasConcept C150493377 @default.
- W2040883421 hasConcept C159985019 @default.
- W2040883421 hasConcept C171250308 @default.
- W2040883421 hasConcept C185544564 @default.
- W2040883421 hasConcept C192562407 @default.
- W2040883421 hasConcept C204223013 @default.
- W2040883421 hasConcept C2777855556 @default.
- W2040883421 hasConcept C2779227376 @default.
- W2040883421 hasConcept C2780477314 @default.
- W2040883421 hasConcept C49040817 @default.
- W2040883421 hasConcept C520434653 @default.
- W2040883421 hasConcept C53524968 @default.
- W2040883421 hasConceptScore W2040883421C105487726 @default.
- W2040883421 hasConceptScore W2040883421C111337013 @default.
- W2040883421 hasConceptScore W2040883421C120665830 @default.
- W2040883421 hasConceptScore W2040883421C121332964 @default.
- W2040883421 hasConceptScore W2040883421C134406635 @default.
- W2040883421 hasConceptScore W2040883421C150493377 @default.
- W2040883421 hasConceptScore W2040883421C159985019 @default.
- W2040883421 hasConceptScore W2040883421C171250308 @default.
- W2040883421 hasConceptScore W2040883421C185544564 @default.
- W2040883421 hasConceptScore W2040883421C192562407 @default.
- W2040883421 hasConceptScore W2040883421C204223013 @default.
- W2040883421 hasConceptScore W2040883421C2777855556 @default.
- W2040883421 hasConceptScore W2040883421C2779227376 @default.
- W2040883421 hasConceptScore W2040883421C2780477314 @default.
- W2040883421 hasConceptScore W2040883421C49040817 @default.
- W2040883421 hasConceptScore W2040883421C520434653 @default.
- W2040883421 hasConceptScore W2040883421C53524968 @default.
- W2040883421 hasLocation W20408834211 @default.
- W2040883421 hasOpenAccess W2040883421 @default.
- W2040883421 hasPrimaryLocation W20408834211 @default.
- W2040883421 hasRelatedWork W1969392490 @default.
- W2040883421 hasRelatedWork W1983564545 @default.
- W2040883421 hasRelatedWork W2000216950 @default.
- W2040883421 hasRelatedWork W2021062766 @default.
- W2040883421 hasRelatedWork W2026149615 @default.
- W2040883421 hasRelatedWork W2038630043 @default.
- W2040883421 hasRelatedWork W2082769316 @default.
- W2040883421 hasRelatedWork W2090851480 @default.
- W2040883421 hasRelatedWork W2096503481 @default.
- W2040883421 hasRelatedWork W2571605234 @default.
- W2040883421 isParatext "false" @default.
- W2040883421 isRetracted "false" @default.
- W2040883421 magId "2040883421" @default.
- W2040883421 workType "article" @default.