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- W2040903575 abstract "Sub-surface damage characterization occurs in semiconductor device fabrication, like diamond turning and milling. Third harmonic generation (THG) microscopy can help to characterize subsurface damage, because nanometer sized asperities caused by defects amplify the THG signal." @default.
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- W2040903575 date "2014-01-01" @default.
- W2040903575 modified "2023-09-24" @default.
- W2040903575 title "Subsurface Damage Characterization with Nonlinear High Numerical Microscopy" @default.
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- W2040903575 doi "https://doi.org/10.1364/fio.2014.jw3a.9" @default.
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