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• W2040962340 endingPage "366" @default.
• W2040962340 startingPage "362" @default.
• W2040962340 abstract "The phase transition of hydrogenated SiGe (SiGe:H) films in plasma enhanced chemical vapor deposition was investigated by varying Ge content and hydrogen dilution ratio, R; the phase transition was then compared with that of hydrogenated Si (Si:H). The incorporation probability of Ge in SiGe:H films was strongly affected by R and continuously increased when R ranged from 7.5 to 80. The incorporation of Ge might interfere with the formation of crystalline seeds in the film due to the increase of disorder. However, once the crystalline seeds are formed in the SiGe:H films, the crystalline volume fraction increased with R more rapidly than that did for Si:H films." @default.
• W2040962340 created "2016-06-24" @default.
• W2040962340 creator A5032531605 @default.
• W2040962340 creator A5035198343 @default.
• W2040962340 creator A5058092942 @default.
• W2040962340 creator A5064423322 @default.
• W2040962340 creator A5085080347 @default.
• W2040962340 date "2013-11-01" @default.
• W2040962340 modified "2023-09-24" @default.
• W2040962340 title "Phase transition of hydrogenated SiGe thin films in plasma-enhanced chemical vapor deposition" @default.
• W2040962340 cites W1970121107 @default.
• W2040962340 cites W1975265464 @default.
• W2040962340 cites W1989660365 @default.
• W2040962340 cites W1993845806 @default.
• W2040962340 cites W1999265636 @default.
• W2040962340 cites W2009988016 @default.
• W2040962340 cites W2023312752 @default.
• W2040962340 cites W2040136050 @default.
• W2040962340 cites W2045038458 @default.
• W2040962340 cites W2046267786 @default.
• W2040962340 cites W2050731994 @default.
• W2040962340 cites W2054763682 @default.
• W2040962340 cites W2057497589 @default.
• W2040962340 cites W2083584550 @default.
• W2040962340 cites W2094628693 @default.
• W2040962340 cites W2097147584 @default.
• W2040962340 cites W2134052963 @default.
• W2040962340 cites W2569660380 @default.
• W2040962340 cites W4242100374 @default.
• W2040962340 doi "https://doi.org/10.1016/j.tsf.2013.04.071" @default.
• W2040962340 hasPublicationYear "2013" @default.
• W2040962340 type Work @default.
• W2040962340 sameAs 2040962340 @default.
• W2040962340 citedByCount "3" @default.
• W2040962340 countsByYear W20409623402014 @default.
• W2040962340 countsByYear W20409623402015 @default.
• W2040962340 countsByYear W20409623402016 @default.
• W2040962340 crossrefType "journal-article" @default.
• W2040962340 hasAuthorship W2040962340A5032531605 @default.
• W2040962340 hasAuthorship W2040962340A5035198343 @default.
• W2040962340 hasAuthorship W2040962340A5058092942 @default.
• W2040962340 hasAuthorship W2040962340A5064423322 @default.
• W2040962340 hasAuthorship W2040962340A5085080347 @default.
• W2040962340 hasConcept C113196181 @default.
• W2040962340 hasConcept C121332964 @default.
• W2040962340 hasConcept C127413603 @default.
• W2040962340 hasConcept C149288129 @default.
• W2040962340 hasConcept C151730666 @default.
• W2040962340 hasConcept C159985019 @default.
• W2040962340 hasConcept C171250308 @default.
• W2040962340 hasConcept C178790620 @default.
• W2040962340 hasConcept C185592680 @default.
• W2040962340 hasConcept C19067145 @default.
• W2040962340 hasConcept C192562407 @default.
• W2040962340 hasConcept C26873012 @default.
• W2040962340 hasConcept C2816523 @default.
• W2040962340 hasConcept C38347018 @default.
• W2040962340 hasConcept C42360764 @default.
• W2040962340 hasConcept C44280652 @default.
• W2040962340 hasConcept C512968161 @default.
• W2040962340 hasConcept C57410435 @default.
• W2040962340 hasConcept C62520636 @default.
• W2040962340 hasConcept C64297162 @default.
• W2040962340 hasConcept C65590680 @default.
• W2040962340 hasConcept C71987851 @default.
• W2040962340 hasConcept C82706917 @default.
• W2040962340 hasConcept C86803240 @default.
• W2040962340 hasConceptScore W2040962340C113196181 @default.
• W2040962340 hasConceptScore W2040962340C121332964 @default.
• W2040962340 hasConceptScore W2040962340C127413603 @default.
• W2040962340 hasConceptScore W2040962340C149288129 @default.
• W2040962340 hasConceptScore W2040962340C151730666 @default.
• W2040962340 hasConceptScore W2040962340C159985019 @default.
• W2040962340 hasConceptScore W2040962340C171250308 @default.
• W2040962340 hasConceptScore W2040962340C178790620 @default.
• W2040962340 hasConceptScore W2040962340C185592680 @default.
• W2040962340 hasConceptScore W2040962340C19067145 @default.
• W2040962340 hasConceptScore W2040962340C192562407 @default.
• W2040962340 hasConceptScore W2040962340C26873012 @default.
• W2040962340 hasConceptScore W2040962340C2816523 @default.
• W2040962340 hasConceptScore W2040962340C38347018 @default.
• W2040962340 hasConceptScore W2040962340C42360764 @default.
• W2040962340 hasConceptScore W2040962340C44280652 @default.
• W2040962340 hasConceptScore W2040962340C512968161 @default.
• W2040962340 hasConceptScore W2040962340C57410435 @default.
• W2040962340 hasConceptScore W2040962340C62520636 @default.
• W2040962340 hasConceptScore W2040962340C64297162 @default.
• W2040962340 hasConceptScore W2040962340C65590680 @default.
• W2040962340 hasConceptScore W2040962340C71987851 @default.
• W2040962340 hasConceptScore W2040962340C82706917 @default.
• W2040962340 hasConceptScore W2040962340C86803240 @default.
• W2040962340 hasLocation W20409623401 @default.
• W2040962340 hasOpenAccess W2040962340 @default.
• W2040962340 hasPrimaryLocation W20409623401 @default.
• W2040962340 hasRelatedWork W1503002209 @default.
• W2040962340 hasRelatedWork W1538914967 @default.
• W2040962340 hasRelatedWork W2003971460 @default.
• W2040962340 hasRelatedWork W2069462184 @default.

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