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W2040982252 abstract "Starting from a simple atomic model by Lindhard giving a power potential between ions and atoms as V(r)=z1z2e2an-1/nrn, we assumed that the first collision with a metal atom is of the weakly screened type (n=2) or Rutherford type (n=1) and that subsequent collisions of displaced atoms are similar to collisions of hard spheres (n=5). On this basis, consistent expressions were obtained for the maximum yield Smax with the corresponding energy Em for n=2, and the universal curve of yield-energy, which on the number of atms in the target materials per unit volume N, the effective atomic radius a and the displacement energy Ed. The results were in good agreement with experiments over the energy range from 50 eV to 500 keV." @default.
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W2040982252 date "1973-09-01" @default.
W2040982252 modified "2023-09-27" @default.
W2040982252 title "Consistent Theory of Sputtering of Solid Targets by Ion Bombardment Using Power Potential Law" @default.
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W2040982252 doi "https://doi.org/10.1143/jjap.12.1297" @default.
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