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- W2040984891 endingPage "842" @default.
- W2040984891 startingPage "839" @default.
- W2040984891 abstract "The composition of the oxygen discharges from two inductively coupled plasma sources is studied experimentally with tuned cylindrical Langmuir probes, with optical emission spectroscopy, and with a compact mass spectrometer. The data show that low frequency cylindrical discharges are highly dissociated at low neutral pressures and at high powers, whereas high frequency planar discharges have less atomic content." @default.
- W2040984891 created "2016-06-24" @default.
- W2040984891 creator A5022009441 @default.
- W2040984891 creator A5044779379 @default.
- W2040984891 creator A5055041824 @default.
- W2040984891 date "1995-05-01" @default.
- W2040984891 modified "2023-09-27" @default.
- W2040984891 title "Composition of the oxygen plasmas from two inductively coupled sources" @default.
- W2040984891 doi "https://doi.org/10.1116/1.579838" @default.
- W2040984891 hasPublicationYear "1995" @default.
- W2040984891 type Work @default.
- W2040984891 sameAs 2040984891 @default.
- W2040984891 citedByCount "29" @default.
- W2040984891 countsByYear W20409848912013 @default.
- W2040984891 countsByYear W20409848912014 @default.
- W2040984891 countsByYear W20409848912015 @default.
- W2040984891 countsByYear W20409848912017 @default.
- W2040984891 countsByYear W20409848912019 @default.
- W2040984891 countsByYear W20409848912021 @default.
- W2040984891 crossrefType "journal-article" @default.
- W2040984891 hasAuthorship W2040984891A5022009441 @default.
- W2040984891 hasAuthorship W2040984891A5044779379 @default.
- W2040984891 hasAuthorship W2040984891A5055041824 @default.
- W2040984891 hasConcept C107872376 @default.
- W2040984891 hasConcept C113196181 @default.
- W2040984891 hasConcept C120665830 @default.
- W2040984891 hasConcept C121332964 @default.
- W2040984891 hasConcept C121684516 @default.
- W2040984891 hasConcept C134786449 @default.
- W2040984891 hasConcept C162356407 @default.
- W2040984891 hasConcept C165697059 @default.
- W2040984891 hasConcept C176118016 @default.
- W2040984891 hasConcept C178790620 @default.
- W2040984891 hasConcept C184779094 @default.
- W2040984891 hasConcept C185544564 @default.
- W2040984891 hasConcept C185592680 @default.
- W2040984891 hasConcept C192562407 @default.
- W2040984891 hasConcept C196009443 @default.
- W2040984891 hasConcept C32891209 @default.
- W2040984891 hasConcept C33390570 @default.
- W2040984891 hasConcept C41008148 @default.
- W2040984891 hasConcept C43503373 @default.
- W2040984891 hasConcept C43617362 @default.
- W2040984891 hasConcept C540031477 @default.
- W2040984891 hasConcept C62520636 @default.
- W2040984891 hasConcept C82706917 @default.
- W2040984891 hasConcept C95974651 @default.
- W2040984891 hasConceptScore W2040984891C107872376 @default.
- W2040984891 hasConceptScore W2040984891C113196181 @default.
- W2040984891 hasConceptScore W2040984891C120665830 @default.
- W2040984891 hasConceptScore W2040984891C121332964 @default.
- W2040984891 hasConceptScore W2040984891C121684516 @default.
- W2040984891 hasConceptScore W2040984891C134786449 @default.
- W2040984891 hasConceptScore W2040984891C162356407 @default.
- W2040984891 hasConceptScore W2040984891C165697059 @default.
- W2040984891 hasConceptScore W2040984891C176118016 @default.
- W2040984891 hasConceptScore W2040984891C178790620 @default.
- W2040984891 hasConceptScore W2040984891C184779094 @default.
- W2040984891 hasConceptScore W2040984891C185544564 @default.
- W2040984891 hasConceptScore W2040984891C185592680 @default.
- W2040984891 hasConceptScore W2040984891C192562407 @default.
- W2040984891 hasConceptScore W2040984891C196009443 @default.
- W2040984891 hasConceptScore W2040984891C32891209 @default.
- W2040984891 hasConceptScore W2040984891C33390570 @default.
- W2040984891 hasConceptScore W2040984891C41008148 @default.
- W2040984891 hasConceptScore W2040984891C43503373 @default.
- W2040984891 hasConceptScore W2040984891C43617362 @default.
- W2040984891 hasConceptScore W2040984891C540031477 @default.
- W2040984891 hasConceptScore W2040984891C62520636 @default.
- W2040984891 hasConceptScore W2040984891C82706917 @default.
- W2040984891 hasConceptScore W2040984891C95974651 @default.
- W2040984891 hasIssue "3" @default.
- W2040984891 hasLocation W20409848911 @default.
- W2040984891 hasOpenAccess W2040984891 @default.
- W2040984891 hasPrimaryLocation W20409848911 @default.
- W2040984891 hasRelatedWork W1964877028 @default.
- W2040984891 hasRelatedWork W1972707305 @default.
- W2040984891 hasRelatedWork W1998773873 @default.
- W2040984891 hasRelatedWork W2034666521 @default.
- W2040984891 hasRelatedWork W2069397480 @default.
- W2040984891 hasRelatedWork W2103891234 @default.
- W2040984891 hasRelatedWork W2166983106 @default.
- W2040984891 hasRelatedWork W3162271292 @default.
- W2040984891 hasRelatedWork W3214032012 @default.
- W2040984891 hasRelatedWork W2133432655 @default.
- W2040984891 hasVolume "13" @default.
- W2040984891 isParatext "false" @default.
- W2040984891 isRetracted "false" @default.
- W2040984891 magId "2040984891" @default.
- W2040984891 workType "article" @default.