Matches in SemOpenAlex for { <https://semopenalex.org/work/W2040987031> ?p ?o ?g. }
- W2040987031 endingPage "H991" @default.
- W2040987031 startingPage "H991" @default.
- W2040987031 abstract "Stress–relaxation phenomena in SiGe-on-insulator (SGOI) layers during the oxidation-induced Ge condensation process have been comprehensively investigated as a function of several parameters (SiGe thickness, Ge fraction, oxidation temperature, and oxidation time). Final SiGe thickness-dependent relaxation ratio was found, i.e., complete relaxation for thick SGOI layers, and abrupt decrease in relaxation ratio with decreasing SiGe thickness below 100 nm, e.g., the relaxation ratio of 30% for the SiGe thickness of 30 nm. An improved method combined with irradiation and postannealing has been examined to enhance the stress–relaxation. This achieved a high relaxation ratio (70%) and a low defect density in the ultrathin (28 nm) SGOI with a Ge fraction of 30%. A local-area slipping model was proposed, where interface slipping occurred during postannealing in local areas surrounded by cross hatches. This model quantitatively explained the enhanced relaxation ratio of the SGOI layers obtained by the Ge condensation method combined with irradiation and postannealing." @default.
- W2040987031 created "2016-06-24" @default.
- W2040987031 creator A5031428988 @default.
- W2040987031 creator A5056595282 @default.
- W2040987031 creator A5081429604 @default.
- W2040987031 date "2010-01-01" @default.
- W2040987031 modified "2023-10-06" @default.
- W2040987031 title "Relaxation Mechanism of SiGe-on-Insulator by Oxidation-Induced Ge Condensation with H[sup +] Irradiation and Postannealing" @default.
- W2040987031 cites W1965528060 @default.
- W2040987031 cites W1974675817 @default.
- W2040987031 cites W1980060339 @default.
- W2040987031 cites W1991805416 @default.
- W2040987031 cites W2002269722 @default.
- W2040987031 cites W2011042741 @default.
- W2040987031 cites W2013137617 @default.
- W2040987031 cites W2014230821 @default.
- W2040987031 cites W2019179494 @default.
- W2040987031 cites W2020647706 @default.
- W2040987031 cites W2025584145 @default.
- W2040987031 cites W2028462509 @default.
- W2040987031 cites W2029383455 @default.
- W2040987031 cites W2039344789 @default.
- W2040987031 cites W2060341668 @default.
- W2040987031 cites W2069221388 @default.
- W2040987031 cites W2071167294 @default.
- W2040987031 cites W2072417609 @default.
- W2040987031 cites W2077067721 @default.
- W2040987031 cites W2077955442 @default.
- W2040987031 cites W2079391869 @default.
- W2040987031 cites W2084435474 @default.
- W2040987031 cites W2086239803 @default.
- W2040987031 cites W2091607877 @default.
- W2040987031 cites W2132718266 @default.
- W2040987031 cites W2135358483 @default.
- W2040987031 cites W2137173887 @default.
- W2040987031 cites W2167300113 @default.
- W2040987031 doi "https://doi.org/10.1149/1.3486089" @default.
- W2040987031 hasPublicationYear "2010" @default.
- W2040987031 type Work @default.
- W2040987031 sameAs 2040987031 @default.
- W2040987031 citedByCount "1" @default.
- W2040987031 countsByYear W20409870312015 @default.
- W2040987031 crossrefType "journal-article" @default.
- W2040987031 hasAuthorship W2040987031A5031428988 @default.
- W2040987031 hasAuthorship W2040987031A5056595282 @default.
- W2040987031 hasAuthorship W2040987031A5081429604 @default.
- W2040987031 hasConcept C111337013 @default.
- W2040987031 hasConcept C113196181 @default.
- W2040987031 hasConcept C121332964 @default.
- W2040987031 hasConcept C127413603 @default.
- W2040987031 hasConcept C149912024 @default.
- W2040987031 hasConcept C15744967 @default.
- W2040987031 hasConcept C159985019 @default.
- W2040987031 hasConcept C185544564 @default.
- W2040987031 hasConcept C185592680 @default.
- W2040987031 hasConcept C192562407 @default.
- W2040987031 hasConcept C200093464 @default.
- W2040987031 hasConcept C202974441 @default.
- W2040987031 hasConcept C212702 @default.
- W2040987031 hasConcept C26873012 @default.
- W2040987031 hasConcept C2776029896 @default.
- W2040987031 hasConcept C2777045574 @default.
- W2040987031 hasConcept C2777855556 @default.
- W2040987031 hasConcept C43617362 @default.
- W2040987031 hasConcept C77805123 @default.
- W2040987031 hasConcept C78519656 @default.
- W2040987031 hasConcept C97355855 @default.
- W2040987031 hasConceptScore W2040987031C111337013 @default.
- W2040987031 hasConceptScore W2040987031C113196181 @default.
- W2040987031 hasConceptScore W2040987031C121332964 @default.
- W2040987031 hasConceptScore W2040987031C127413603 @default.
- W2040987031 hasConceptScore W2040987031C149912024 @default.
- W2040987031 hasConceptScore W2040987031C15744967 @default.
- W2040987031 hasConceptScore W2040987031C159985019 @default.
- W2040987031 hasConceptScore W2040987031C185544564 @default.
- W2040987031 hasConceptScore W2040987031C185592680 @default.
- W2040987031 hasConceptScore W2040987031C192562407 @default.
- W2040987031 hasConceptScore W2040987031C200093464 @default.
- W2040987031 hasConceptScore W2040987031C202974441 @default.
- W2040987031 hasConceptScore W2040987031C212702 @default.
- W2040987031 hasConceptScore W2040987031C26873012 @default.
- W2040987031 hasConceptScore W2040987031C2776029896 @default.
- W2040987031 hasConceptScore W2040987031C2777045574 @default.
- W2040987031 hasConceptScore W2040987031C2777855556 @default.
- W2040987031 hasConceptScore W2040987031C43617362 @default.
- W2040987031 hasConceptScore W2040987031C77805123 @default.
- W2040987031 hasConceptScore W2040987031C78519656 @default.
- W2040987031 hasConceptScore W2040987031C97355855 @default.
- W2040987031 hasIssue "11" @default.
- W2040987031 hasLocation W20409870311 @default.
- W2040987031 hasOpenAccess W2040987031 @default.
- W2040987031 hasPrimaryLocation W20409870311 @default.
- W2040987031 hasRelatedWork W1970999875 @default.
- W2040987031 hasRelatedWork W2005824415 @default.
- W2040987031 hasRelatedWork W2019286687 @default.
- W2040987031 hasRelatedWork W2054858771 @default.
- W2040987031 hasRelatedWork W2372999110 @default.
- W2040987031 hasRelatedWork W2394269979 @default.