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- W2041171773 abstract "Transparent and electrically conductive (TCO) thin films of ZnO:Al, ZnO:Ga and ZnO:Sc, used in solar cells as well as optoelectronic devices, have been successfully deposited by rf magnetron sputter deposition using ZnO(98%) / X <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> O <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> (2%) ceramic target, X ∈{Al, Ga, Sc}, in the inert atmosphere of argon. In this contribution we focused on the changes in physical properties and their comparison in dependence on doping element. The XRD analyses, four probe measurements and UV-VIS spectroscopy were applied to investigate the structure (texture, lattice stress, grain size), electrical (resistivity) and optical (transmittance, optical band gap) properties of TCOs on the glass substrates." @default.
- W2041171773 created "2016-06-24" @default.
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- W2041171773 date "2010-10-01" @default.
- W2041171773 modified "2023-10-16" @default.
- W2041171773 title "Study of ZnO films grown with different dopants - physical properties and their comparison" @default.
- W2041171773 cites W1969488369 @default.
- W2041171773 doi "https://doi.org/10.1109/asdam.2010.5666334" @default.
- W2041171773 hasPublicationYear "2010" @default.
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