Matches in SemOpenAlex for { <https://semopenalex.org/work/W2041219558> ?p ?o ?g. }
- W2041219558 endingPage "483" @default.
- W2041219558 startingPage "475" @default.
- W2041219558 abstract "Low temperature laser processing of W using WF 6 and SiH 4 is discussed. This process can be applied with limited thermal budget to various substrates, giving the possibility of depositing thin films on fragile substrates like polyimide or GaAs. In a direct writing mode, an Ar + laser and a diode laser have been used to produce WSi x with various controlled line profiles on polyimide and TiN. Best resistivities are between 40 and 80 μ ω·cm and the composition W/Si vary from 1.4 to 1.8. Excimer laser induced deposition of W on GaAs for making Schottky contacts has also been investigated. This process yields pure α -W deposits with resistivities of 20 μ ω · cm." @default.
- W2041219558 created "2016-06-24" @default.
- W2041219558 creator A5001364025 @default.
- W2041219558 creator A5014608481 @default.
- W2041219558 creator A5028245112 @default.
- W2041219558 creator A5047246992 @default.
- W2041219558 creator A5052071660 @default.
- W2041219558 creator A5085387574 @default.
- W2041219558 date "1995-02-01" @default.
- W2041219558 modified "2023-10-17" @default.
- W2041219558 title "Laser processing of tungsten from WF6 and SiH4" @default.
- W2041219558 cites W1552901919 @default.
- W2041219558 cites W1966341022 @default.
- W2041219558 cites W1973142553 @default.
- W2041219558 cites W1980471807 @default.
- W2041219558 cites W1982939295 @default.
- W2041219558 cites W1984903492 @default.
- W2041219558 cites W1985025868 @default.
- W2041219558 cites W1985959984 @default.
- W2041219558 cites W1988353775 @default.
- W2041219558 cites W1992470146 @default.
- W2041219558 cites W2003890564 @default.
- W2041219558 cites W2012411287 @default.
- W2041219558 cites W2017659318 @default.
- W2041219558 cites W2020278310 @default.
- W2041219558 cites W2021308952 @default.
- W2041219558 cites W2023536969 @default.
- W2041219558 cites W2028503462 @default.
- W2041219558 cites W2028566811 @default.
- W2041219558 cites W2046257749 @default.
- W2041219558 cites W2050757410 @default.
- W2041219558 cites W2068144419 @default.
- W2041219558 cites W2068999538 @default.
- W2041219558 cites W2076663432 @default.
- W2041219558 cites W2080784462 @default.
- W2041219558 cites W2089490405 @default.
- W2041219558 cites W2091701841 @default.
- W2041219558 cites W2162123284 @default.
- W2041219558 cites W3122312042 @default.
- W2041219558 cites W653572076 @default.
- W2041219558 doi "https://doi.org/10.1016/0169-4332(94)00455-2" @default.
- W2041219558 hasPublicationYear "1995" @default.
- W2041219558 type Work @default.
- W2041219558 sameAs 2041219558 @default.
- W2041219558 citedByCount "4" @default.
- W2041219558 crossrefType "journal-article" @default.
- W2041219558 hasAuthorship W2041219558A5001364025 @default.
- W2041219558 hasAuthorship W2041219558A5014608481 @default.
- W2041219558 hasAuthorship W2041219558A5028245112 @default.
- W2041219558 hasAuthorship W2041219558A5047246992 @default.
- W2041219558 hasAuthorship W2041219558A5052071660 @default.
- W2041219558 hasAuthorship W2041219558A5085387574 @default.
- W2041219558 hasConcept C113196181 @default.
- W2041219558 hasConcept C120665830 @default.
- W2041219558 hasConcept C121332964 @default.
- W2041219558 hasConcept C151730666 @default.
- W2041219558 hasConcept C159985019 @default.
- W2041219558 hasConcept C171250308 @default.
- W2041219558 hasConcept C185592680 @default.
- W2041219558 hasConcept C19067145 @default.
- W2041219558 hasConcept C191897082 @default.
- W2041219558 hasConcept C192562407 @default.
- W2041219558 hasConcept C205200001 @default.
- W2041219558 hasConcept C2779227376 @default.
- W2041219558 hasConcept C2780477314 @default.
- W2041219558 hasConcept C2780965675 @default.
- W2041219558 hasConcept C2816523 @default.
- W2041219558 hasConcept C43617362 @default.
- W2041219558 hasConcept C49040817 @default.
- W2041219558 hasConcept C520434653 @default.
- W2041219558 hasConcept C525849907 @default.
- W2041219558 hasConcept C542268612 @default.
- W2041219558 hasConcept C64297162 @default.
- W2041219558 hasConcept C78434282 @default.
- W2041219558 hasConcept C86803240 @default.
- W2041219558 hasConceptScore W2041219558C113196181 @default.
- W2041219558 hasConceptScore W2041219558C120665830 @default.
- W2041219558 hasConceptScore W2041219558C121332964 @default.
- W2041219558 hasConceptScore W2041219558C151730666 @default.
- W2041219558 hasConceptScore W2041219558C159985019 @default.
- W2041219558 hasConceptScore W2041219558C171250308 @default.
- W2041219558 hasConceptScore W2041219558C185592680 @default.
- W2041219558 hasConceptScore W2041219558C19067145 @default.
- W2041219558 hasConceptScore W2041219558C191897082 @default.
- W2041219558 hasConceptScore W2041219558C192562407 @default.
- W2041219558 hasConceptScore W2041219558C205200001 @default.
- W2041219558 hasConceptScore W2041219558C2779227376 @default.
- W2041219558 hasConceptScore W2041219558C2780477314 @default.
- W2041219558 hasConceptScore W2041219558C2780965675 @default.
- W2041219558 hasConceptScore W2041219558C2816523 @default.
- W2041219558 hasConceptScore W2041219558C43617362 @default.
- W2041219558 hasConceptScore W2041219558C49040817 @default.
- W2041219558 hasConceptScore W2041219558C520434653 @default.
- W2041219558 hasConceptScore W2041219558C525849907 @default.
- W2041219558 hasConceptScore W2041219558C542268612 @default.
- W2041219558 hasConceptScore W2041219558C64297162 @default.
- W2041219558 hasConceptScore W2041219558C78434282 @default.
- W2041219558 hasConceptScore W2041219558C86803240 @default.