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- W2041406566 abstract "A microscope coherent optical processor based on the VanderLugt optical correlator is applied to the measurement of registration error in multilayer integrated-circuit wafers. A treatment of the effects of wafer faults on the correlation signal is given. Threshold criteria and fault-induced peak splitting of the correlation signal from reject production samples are exploited to demonstrate the easy and rapid detection of faults in partially processed integrated-circuit wafers." @default.
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- W2041406566 date "1994-07-10" @default.
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- W2041406566 title "Wafer fault measurement by coherent optical processor" @default.
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- W2041406566 doi "https://doi.org/10.1364/ao.33.004487" @default.
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