Matches in SemOpenAlex for { <https://semopenalex.org/work/W2041502422> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W2041502422 abstract "Multi gas sensor systems are often the only way for increasing selectivity of a gas measurement in a given environment. It is shown that the cycled heating of sensor membranes give the possibility for quantitative analysis of gas mixtures. In addition the integration of several thermally decoupled sensor elements with different gas sensitivities on one silicon chip is possible. On the other hand for hand held devices low power consumption is necessary. In this paper we present results on a microstructured silicon substrate with different gas sensors, each placed on a thermally insulated silicon membrane, optimized for cycled heating." @default.
- W2041502422 created "2016-06-24" @default.
- W2041502422 creator A5022420256 @default.
- W2041502422 creator A5039146501 @default.
- W2041502422 creator A5082470733 @default.
- W2041502422 date "1998-12-18" @default.
- W2041502422 modified "2023-09-26" @default.
- W2041502422 title "<title>Microstructured silicon substrate for low-power multi-gas-sensor applications</title>" @default.
- W2041502422 doi "https://doi.org/10.1117/12.333740" @default.
- W2041502422 hasPublicationYear "1998" @default.
- W2041502422 type Work @default.
- W2041502422 sameAs 2041502422 @default.
- W2041502422 citedByCount "0" @default.
- W2041502422 crossrefType "proceedings-article" @default.
- W2041502422 hasAuthorship W2041502422A5022420256 @default.
- W2041502422 hasAuthorship W2041502422A5039146501 @default.
- W2041502422 hasAuthorship W2041502422A5082470733 @default.
- W2041502422 hasConcept C111368507 @default.
- W2041502422 hasConcept C119599485 @default.
- W2041502422 hasConcept C121332964 @default.
- W2041502422 hasConcept C127313418 @default.
- W2041502422 hasConcept C127413603 @default.
- W2041502422 hasConcept C163258240 @default.
- W2041502422 hasConcept C165005293 @default.
- W2041502422 hasConcept C171250308 @default.
- W2041502422 hasConcept C185592680 @default.
- W2041502422 hasConcept C192562407 @default.
- W2041502422 hasConcept C24326235 @default.
- W2041502422 hasConcept C2777289219 @default.
- W2041502422 hasConcept C2983805867 @default.
- W2041502422 hasConcept C2984118289 @default.
- W2041502422 hasConcept C41625074 @default.
- W2041502422 hasConcept C49040817 @default.
- W2041502422 hasConcept C544956773 @default.
- W2041502422 hasConcept C55493867 @default.
- W2041502422 hasConcept C62520636 @default.
- W2041502422 hasConceptScore W2041502422C111368507 @default.
- W2041502422 hasConceptScore W2041502422C119599485 @default.
- W2041502422 hasConceptScore W2041502422C121332964 @default.
- W2041502422 hasConceptScore W2041502422C127313418 @default.
- W2041502422 hasConceptScore W2041502422C127413603 @default.
- W2041502422 hasConceptScore W2041502422C163258240 @default.
- W2041502422 hasConceptScore W2041502422C165005293 @default.
- W2041502422 hasConceptScore W2041502422C171250308 @default.
- W2041502422 hasConceptScore W2041502422C185592680 @default.
- W2041502422 hasConceptScore W2041502422C192562407 @default.
- W2041502422 hasConceptScore W2041502422C24326235 @default.
- W2041502422 hasConceptScore W2041502422C2777289219 @default.
- W2041502422 hasConceptScore W2041502422C2983805867 @default.
- W2041502422 hasConceptScore W2041502422C2984118289 @default.
- W2041502422 hasConceptScore W2041502422C41625074 @default.
- W2041502422 hasConceptScore W2041502422C49040817 @default.
- W2041502422 hasConceptScore W2041502422C544956773 @default.
- W2041502422 hasConceptScore W2041502422C55493867 @default.
- W2041502422 hasConceptScore W2041502422C62520636 @default.
- W2041502422 hasLocation W20415024221 @default.
- W2041502422 hasOpenAccess W2041502422 @default.
- W2041502422 hasPrimaryLocation W20415024221 @default.
- W2041502422 hasRelatedWork W1585762667 @default.
- W2041502422 hasRelatedWork W1920931689 @default.
- W2041502422 hasRelatedWork W1943918190 @default.
- W2041502422 hasRelatedWork W1975926196 @default.
- W2041502422 hasRelatedWork W1978036641 @default.
- W2041502422 hasRelatedWork W2001714940 @default.
- W2041502422 hasRelatedWork W2066773469 @default.
- W2041502422 hasRelatedWork W2093032147 @default.
- W2041502422 hasRelatedWork W2114148151 @default.
- W2041502422 hasRelatedWork W2125120516 @default.
- W2041502422 hasRelatedWork W2534844385 @default.
- W2041502422 hasRelatedWork W2737514962 @default.
- W2041502422 hasRelatedWork W2950052879 @default.
- W2041502422 hasRelatedWork W1608084483 @default.
- W2041502422 hasRelatedWork W2155842017 @default.
- W2041502422 hasRelatedWork W2416711224 @default.
- W2041502422 hasRelatedWork W2844312907 @default.
- W2041502422 hasRelatedWork W2871860575 @default.
- W2041502422 hasRelatedWork W2927070994 @default.
- W2041502422 hasRelatedWork W2957759198 @default.
- W2041502422 isParatext "false" @default.
- W2041502422 isRetracted "false" @default.
- W2041502422 magId "2041502422" @default.
- W2041502422 workType "article" @default.