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- W2041505979 abstract "In this work a Monte Carlo method is used to analyze two-dimensional ion distributions in a crystalline silicon target. The results show under which conditions nonnegligible lateral and in-depth tails may appear in these distributions." @default.
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- W2041505979 date "1988-07-01" @default.
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- W2041505979 title "Monte Carlo simulation of two-dimensional distributions of implanted ions in a crystalline silicon target" @default.
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- W2041505979 doi "https://doi.org/10.1016/0168-583x(88)90358-8" @default.
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