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- W2041597788 abstract "For the achievement of the 0.25 micrometers design rule technology, the CD variations must not exceed +/- 25 nm; this has to be ensured by a high performance reproducible process. The resolution capability of DUV lithography at 248 nm has already been demonstrated. However, positive tone DUV materials and their associated processes are still under optimization. Among the various process steps to be optimized, the baking steps are of great importance. Taking into account the conclusions drawn on SB mechanisms in a previous work, the role of PEB has been studied in order to obtain better linewidth control and process reproducibility. For this study, the BASF ST2 resist has been chosen as a typical example of advanced DUV positive resists. The lithographic experiments have been performed in a 200 mm DUV lithographic cell, including an ASM-L 5500/90 DUV stepper and a MARK 8 TEL track. Two main conclusions can be drawn. Firstly, the experimental results obtained clearly demonstrate that the PEB temperature is directly correlated with the viscoelastic properties (Tg) of the resist material: two diffusion regimes, below and above Tg, can be observed. Secondly, the process latitude as well as CD reproducibility are increased for PEB temperatures below Tg." @default.
- W2041597788 created "2016-06-24" @default.
- W2041597788 creator A5014450384 @default.
- W2041597788 creator A5025350742 @default.
- W2041597788 creator A5067999849 @default.
- W2041597788 creator A5073197394 @default.
- W2041597788 creator A5073427918 @default.
- W2041597788 date "1995-06-09" @default.
- W2041597788 modified "2023-09-25" @default.
- W2041597788 title "<title>Optimization of CD control in DUV positive resists: influence of photoresist viscoelastic properties on PEB conditions</title>" @default.
- W2041597788 doi "https://doi.org/10.1117/12.210408" @default.
- W2041597788 hasPublicationYear "1995" @default.
- W2041597788 type Work @default.
- W2041597788 sameAs 2041597788 @default.
- W2041597788 citedByCount "6" @default.
- W2041597788 crossrefType "proceedings-article" @default.
- W2041597788 hasAuthorship W2041597788A5014450384 @default.
- W2041597788 hasAuthorship W2041597788A5025350742 @default.
- W2041597788 hasAuthorship W2041597788A5067999849 @default.
- W2041597788 hasAuthorship W2041597788A5073197394 @default.
- W2041597788 hasAuthorship W2041597788A5073427918 @default.
- W2041597788 hasConcept C105487726 @default.
- W2041597788 hasConcept C120665830 @default.
- W2041597788 hasConcept C121332964 @default.
- W2041597788 hasConcept C134406635 @default.
- W2041597788 hasConcept C142181693 @default.
- W2041597788 hasConcept C159985019 @default.
- W2041597788 hasConcept C171250308 @default.
- W2041597788 hasConcept C185592680 @default.
- W2041597788 hasConcept C186541917 @default.
- W2041597788 hasConcept C187504802 @default.
- W2041597788 hasConcept C192562407 @default.
- W2041597788 hasConcept C200274948 @default.
- W2041597788 hasConcept C204223013 @default.
- W2041597788 hasConcept C2779227376 @default.
- W2041597788 hasConcept C43617362 @default.
- W2041597788 hasConcept C49040817 @default.
- W2041597788 hasConcept C520434653 @default.
- W2041597788 hasConcept C53524968 @default.
- W2041597788 hasConcept C9893847 @default.
- W2041597788 hasConceptScore W2041597788C105487726 @default.
- W2041597788 hasConceptScore W2041597788C120665830 @default.
- W2041597788 hasConceptScore W2041597788C121332964 @default.
- W2041597788 hasConceptScore W2041597788C134406635 @default.
- W2041597788 hasConceptScore W2041597788C142181693 @default.
- W2041597788 hasConceptScore W2041597788C159985019 @default.
- W2041597788 hasConceptScore W2041597788C171250308 @default.
- W2041597788 hasConceptScore W2041597788C185592680 @default.
- W2041597788 hasConceptScore W2041597788C186541917 @default.
- W2041597788 hasConceptScore W2041597788C187504802 @default.
- W2041597788 hasConceptScore W2041597788C192562407 @default.
- W2041597788 hasConceptScore W2041597788C200274948 @default.
- W2041597788 hasConceptScore W2041597788C204223013 @default.
- W2041597788 hasConceptScore W2041597788C2779227376 @default.
- W2041597788 hasConceptScore W2041597788C43617362 @default.
- W2041597788 hasConceptScore W2041597788C49040817 @default.
- W2041597788 hasConceptScore W2041597788C520434653 @default.
- W2041597788 hasConceptScore W2041597788C53524968 @default.
- W2041597788 hasConceptScore W2041597788C9893847 @default.
- W2041597788 hasLocation W20415977881 @default.
- W2041597788 hasOpenAccess W2041597788 @default.
- W2041597788 hasPrimaryLocation W20415977881 @default.
- W2041597788 hasRelatedWork W1972644224 @default.
- W2041597788 hasRelatedWork W1990128344 @default.
- W2041597788 hasRelatedWork W1991929968 @default.
- W2041597788 hasRelatedWork W2011474893 @default.
- W2041597788 hasRelatedWork W2038369548 @default.
- W2041597788 hasRelatedWork W2039921045 @default.
- W2041597788 hasRelatedWork W2071629416 @default.
- W2041597788 hasRelatedWork W2136084319 @default.
- W2041597788 hasRelatedWork W3091884080 @default.
- W2041597788 hasRelatedWork W1990113927 @default.
- W2041597788 isParatext "false" @default.
- W2041597788 isRetracted "false" @default.
- W2041597788 magId "2041597788" @default.
- W2041597788 workType "article" @default.