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- W2041636198 endingPage "6266" @default.
- W2041636198 startingPage "6266" @default.
- W2041636198 abstract "The development mechanisms of irradiated novolak-diazonaphthoquinone resists have been studied on the basis of the atomic force microscopy (AFM) data of resist surface images. The characteristic surfaces with large holes or island structures, that is, nonhomogeneous surfaces, have been observed at the exposure doses near the beginning of the film thickness reduction. The changes in the size of holes and island structures roughly correspond to the changes of cluster size estimated by percolation theory. From the dissolution pattern changes which depend on exposure dose, it is considered that an adequate exposure dose is indispensable for high-precision patterns and such an exposure dose determines the sensitivity of positive-type resists." @default.
- W2041636198 created "2016-06-24" @default.
- W2041636198 creator A5020011335 @default.
- W2041636198 creator A5052697495 @default.
- W2041636198 creator A5074819917 @default.
- W2041636198 creator A5082100345 @default.
- W2041636198 date "1998-11-01" @default.
- W2041636198 modified "2023-09-26" @default.
- W2041636198 title "Nonhomogeneous Pattern Formation in the Dissolution Processes of Novolak-Diazonaphthoquinone Resists" @default.
- W2041636198 cites W1965030872 @default.
- W2041636198 cites W1966002572 @default.
- W2041636198 cites W2048778901 @default.
- W2041636198 cites W2095129671 @default.
- W2041636198 cites W2100770535 @default.
- W2041636198 cites W2114849078 @default.
- W2041636198 doi "https://doi.org/10.1143/jjap.37.6266" @default.
- W2041636198 hasPublicationYear "1998" @default.
- W2041636198 type Work @default.
- W2041636198 sameAs 2041636198 @default.
- W2041636198 citedByCount "4" @default.
- W2041636198 crossrefType "journal-article" @default.
- W2041636198 hasAuthorship W2041636198A5020011335 @default.
- W2041636198 hasAuthorship W2041636198A5052697495 @default.
- W2041636198 hasAuthorship W2041636198A5074819917 @default.
- W2041636198 hasAuthorship W2041636198A5082100345 @default.
- W2041636198 hasConcept C102951782 @default.
- W2041636198 hasConcept C111337013 @default.
- W2041636198 hasConcept C11557063 @default.
- W2041636198 hasConcept C121332964 @default.
- W2041636198 hasConcept C131540310 @default.
- W2041636198 hasConcept C134406635 @default.
- W2041636198 hasConcept C147789679 @default.
- W2041636198 hasConcept C159467904 @default.
- W2041636198 hasConcept C164866538 @default.
- W2041636198 hasConcept C169760540 @default.
- W2041636198 hasConcept C171250308 @default.
- W2041636198 hasConcept C185544564 @default.
- W2041636198 hasConcept C185592680 @default.
- W2041636198 hasConcept C192562407 @default.
- W2041636198 hasConcept C199360897 @default.
- W2041636198 hasConcept C2779227376 @default.
- W2041636198 hasConcept C2780457167 @default.
- W2041636198 hasConcept C41008148 @default.
- W2041636198 hasConcept C53524968 @default.
- W2041636198 hasConcept C86803240 @default.
- W2041636198 hasConcept C88380143 @default.
- W2041636198 hasConceptScore W2041636198C102951782 @default.
- W2041636198 hasConceptScore W2041636198C111337013 @default.
- W2041636198 hasConceptScore W2041636198C11557063 @default.
- W2041636198 hasConceptScore W2041636198C121332964 @default.
- W2041636198 hasConceptScore W2041636198C131540310 @default.
- W2041636198 hasConceptScore W2041636198C134406635 @default.
- W2041636198 hasConceptScore W2041636198C147789679 @default.
- W2041636198 hasConceptScore W2041636198C159467904 @default.
- W2041636198 hasConceptScore W2041636198C164866538 @default.
- W2041636198 hasConceptScore W2041636198C169760540 @default.
- W2041636198 hasConceptScore W2041636198C171250308 @default.
- W2041636198 hasConceptScore W2041636198C185544564 @default.
- W2041636198 hasConceptScore W2041636198C185592680 @default.
- W2041636198 hasConceptScore W2041636198C192562407 @default.
- W2041636198 hasConceptScore W2041636198C199360897 @default.
- W2041636198 hasConceptScore W2041636198C2779227376 @default.
- W2041636198 hasConceptScore W2041636198C2780457167 @default.
- W2041636198 hasConceptScore W2041636198C41008148 @default.
- W2041636198 hasConceptScore W2041636198C53524968 @default.
- W2041636198 hasConceptScore W2041636198C86803240 @default.
- W2041636198 hasConceptScore W2041636198C88380143 @default.
- W2041636198 hasIssue "11R" @default.
- W2041636198 hasLocation W20416361981 @default.
- W2041636198 hasOpenAccess W2041636198 @default.
- W2041636198 hasPrimaryLocation W20416361981 @default.
- W2041636198 hasRelatedWork W2008137369 @default.
- W2041636198 hasRelatedWork W2023920900 @default.
- W2041636198 hasRelatedWork W2027873566 @default.
- W2041636198 hasRelatedWork W2030514824 @default.
- W2041636198 hasRelatedWork W2054533916 @default.
- W2041636198 hasRelatedWork W2054555017 @default.
- W2041636198 hasRelatedWork W2056584612 @default.
- W2041636198 hasRelatedWork W2066886638 @default.
- W2041636198 hasRelatedWork W2083213744 @default.
- W2041636198 hasRelatedWork W2013794784 @default.
- W2041636198 hasVolume "37" @default.
- W2041636198 isParatext "false" @default.
- W2041636198 isRetracted "false" @default.
- W2041636198 magId "2041636198" @default.
- W2041636198 workType "article" @default.