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- W2041650968 abstract "Recently, the dEWMA control system has been applied extensively for the semiconductor manufacturing. However, this control scheme exhibits a problem is that the existing R2R control system is scarcely discussed and evaluated about the operation of fault detection. In view of this, the research would combine double exponentially weighted moving average (dEWMA) control, weighted sum squared residual (WSSR), and joint angle analysis (JAA) methods to execute the process control and evaluated the performance of fault detection. Using various process simulations, a better parameter condition in WSSR and JAA algorithm can also be found. At last, a critical step for superconducting wire was used to illustrate the detection procedure for verifying the feasibility in practical application." @default.
- W2041650968 created "2016-06-24" @default.
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- W2041650968 date "2012-12-01" @default.
- W2041650968 modified "2023-09-27" @default.
- W2041650968 title "Evaluation the Performance of Fault Detection for dEWMA Control System" @default.
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- W2041650968 doi "https://doi.org/10.4028/www.scientific.net/amr.630.235" @default.
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