Matches in SemOpenAlex for { <https://semopenalex.org/work/W2041684139> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W2041684139 endingPage "510" @default.
- W2041684139 startingPage "506" @default.
- W2041684139 abstract "The gas-phase reaction products of SiH4, NH3 and their mixtures from a hot-wire CVD chamber were investigated using laser ionization time-of-flight mass spectrometry. Both vacuum ultraviolet laser single photon ionization and laser-induced electron impact ionization were used. The main products observed from a 50% NH3/He sample were H2 and N2. The study of an NH3/SiH4 mixture (PNH3:PSiH4 = 100:1) has shown that the NH3 dissociation on the filament was suppressed by the presence of SiH4 in the system. Signals from Si(NH2)4 and Si(NH2)3 species were identified as products from the 100:1 NH3/SiH4 mixture. The spectrum for a 1:1 NH3/SiH4 mixture was dominated by mass peaks characteristic of SiH4 chemistry in the reactor, i.e. H2, Si2H6, and Si3H8, at low temperatures. The extent to which the decomposition of NH3 is suppressed is enhanced with more SiH4 molecules in the system." @default.
- W2041684139 created "2016-06-24" @default.
- W2041684139 creator A5028079903 @default.
- W2041684139 creator A5063478641 @default.
- W2041684139 creator A5067397325 @default.
- W2041684139 date "2008-01-01" @default.
- W2041684139 modified "2023-10-04" @default.
- W2041684139 title "Mass spectrometric study of gas-phase chemistry in the hot-wire CVD processes of SiH4/NH3 mixtures" @default.
- W2041684139 cites W1589686892 @default.
- W2041684139 cites W1637904466 @default.
- W2041684139 cites W1963657060 @default.
- W2041684139 cites W1968914443 @default.
- W2041684139 cites W1985648251 @default.
- W2041684139 cites W1989215376 @default.
- W2041684139 cites W2001021707 @default.
- W2041684139 cites W2014101925 @default.
- W2041684139 cites W2017874028 @default.
- W2041684139 cites W2018759624 @default.
- W2041684139 cites W2027133164 @default.
- W2041684139 cites W2043929743 @default.
- W2041684139 cites W2074476109 @default.
- W2041684139 cites W2084622121 @default.
- W2041684139 cites W2137242241 @default.
- W2041684139 doi "https://doi.org/10.1016/j.tsf.2007.06.029" @default.
- W2041684139 hasPublicationYear "2008" @default.
- W2041684139 type Work @default.
- W2041684139 sameAs 2041684139 @default.
- W2041684139 citedByCount "9" @default.
- W2041684139 countsByYear W20416841392013 @default.
- W2041684139 countsByYear W20416841392017 @default.
- W2041684139 countsByYear W20416841392018 @default.
- W2041684139 countsByYear W20416841392019 @default.
- W2041684139 countsByYear W20416841392020 @default.
- W2041684139 crossrefType "journal-article" @default.
- W2041684139 hasAuthorship W2041684139A5028079903 @default.
- W2041684139 hasAuthorship W2041684139A5063478641 @default.
- W2041684139 hasAuthorship W2041684139A5067397325 @default.
- W2041684139 hasConcept C102931765 @default.
- W2041684139 hasConcept C113196181 @default.
- W2041684139 hasConcept C120665830 @default.
- W2041684139 hasConcept C121332964 @default.
- W2041684139 hasConcept C145148216 @default.
- W2041684139 hasConcept C147789679 @default.
- W2041684139 hasConcept C162356407 @default.
- W2041684139 hasConcept C178790620 @default.
- W2041684139 hasConcept C185592680 @default.
- W2041684139 hasConcept C192562407 @default.
- W2041684139 hasConcept C198291218 @default.
- W2041684139 hasConcept C205759337 @default.
- W2041684139 hasConcept C2776798109 @default.
- W2041684139 hasConcept C32909587 @default.
- W2041684139 hasConcept C40325409 @default.
- W2041684139 hasConcept C43617362 @default.
- W2041684139 hasConcept C49040817 @default.
- W2041684139 hasConcept C520434653 @default.
- W2041684139 hasConcept C57410435 @default.
- W2041684139 hasConceptScore W2041684139C102931765 @default.
- W2041684139 hasConceptScore W2041684139C113196181 @default.
- W2041684139 hasConceptScore W2041684139C120665830 @default.
- W2041684139 hasConceptScore W2041684139C121332964 @default.
- W2041684139 hasConceptScore W2041684139C145148216 @default.
- W2041684139 hasConceptScore W2041684139C147789679 @default.
- W2041684139 hasConceptScore W2041684139C162356407 @default.
- W2041684139 hasConceptScore W2041684139C178790620 @default.
- W2041684139 hasConceptScore W2041684139C185592680 @default.
- W2041684139 hasConceptScore W2041684139C192562407 @default.
- W2041684139 hasConceptScore W2041684139C198291218 @default.
- W2041684139 hasConceptScore W2041684139C205759337 @default.
- W2041684139 hasConceptScore W2041684139C2776798109 @default.
- W2041684139 hasConceptScore W2041684139C32909587 @default.
- W2041684139 hasConceptScore W2041684139C40325409 @default.
- W2041684139 hasConceptScore W2041684139C43617362 @default.
- W2041684139 hasConceptScore W2041684139C49040817 @default.
- W2041684139 hasConceptScore W2041684139C520434653 @default.
- W2041684139 hasConceptScore W2041684139C57410435 @default.
- W2041684139 hasIssue "5" @default.
- W2041684139 hasLocation W20416841391 @default.
- W2041684139 hasOpenAccess W2041684139 @default.
- W2041684139 hasPrimaryLocation W20416841391 @default.
- W2041684139 hasRelatedWork W1973847141 @default.
- W2041684139 hasRelatedWork W1991467866 @default.
- W2041684139 hasRelatedWork W1994891694 @default.
- W2041684139 hasRelatedWork W1999400391 @default.
- W2041684139 hasRelatedWork W2012487303 @default.
- W2041684139 hasRelatedWork W2039390463 @default.
- W2041684139 hasRelatedWork W2052577302 @default.
- W2041684139 hasRelatedWork W2067018545 @default.
- W2041684139 hasRelatedWork W2076711259 @default.
- W2041684139 hasRelatedWork W3034705924 @default.
- W2041684139 hasVolume "516" @default.
- W2041684139 isParatext "false" @default.
- W2041684139 isRetracted "false" @default.
- W2041684139 magId "2041684139" @default.
- W2041684139 workType "article" @default.