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- W2041748832 abstract "A new structure combining a beam-diaphragm structure and a SOI-on-cavity substrate was proposed in this paper. Both high sensitivity and good linearity could be achieved due to the stress concentrated structure." @default.
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- W2041748832 date "2007-10-01" @default.
- W2041748832 modified "2023-09-23" @default.
- W2041748832 title "A Very Sensitive Pressure Sensor on a SOI-on-Cavity Substrate" @default.
- W2041748832 cites W1981156881 @default.
- W2041748832 doi "https://doi.org/10.1109/soi.2007.4357897" @default.
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