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- W2041892020 abstract "The diffusion of Be from buried Be-doped InGaAs epitaxial layers, grown by gas source molecular beam epitaxy, has been studied for temperatures between 700 and 900°C. A kick-out model, involving neutral Be interstitial species and singly positively charged group III self-interstitials, is proposed for the diffusion mechanism." @default.
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- W2041892020 date "1998-12-01" @default.
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- W2041892020 title "Be diffusion in InGaAs layers grown by gas source molecular beam epitaxy" @default.
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- W2041892020 doi "https://doi.org/10.1016/s0022-0248(98)00727-1" @default.
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