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- W2042018631 abstract "Sub-100nm patterns have been fabricated in thick PMMA film on thick silicon substrates at low beam voltages using commercial e-beam machines. A higher contrast and an improved resolution are obtained by using an IPA development. 50-100nm lines are fabricated in 0.5- 1.0μm PMMA film on silicon substrates with 20-25kV e-beams. Practical aspects of sub-100nm pattern fabrication have been estimated. Pattern accuracy, field butting error, and overlay accuracy are better than ±0.1 μm 3 sigma." @default.
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- W2042018631 date "1986-06-30" @default.
- W2042018631 modified "2023-09-23" @default.
- W2042018631 title "Sub-100nm pattern fabrication in e-beam lithography" @default.
- W2042018631 doi "https://doi.org/10.1117/12.963683" @default.
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