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• W2042019356 abstract "Spectra of the ion mass and energy distributions of positive ions in reactive (Ar/O2) and nonreactive (Ar) dc magnetron sputtering discharges have been investigated by energy-resolved mass spectrometry. The results of three sputter target materials, i.e., Cu, In, and W are compared to each other. Besides the main gas constituents, mass spectra reveal a variety of molecular ions which are dependent on the target material. In reactive mode, ArO+ is always observed in Ar/O2 but molecules containing Ar and the metal were exclusively found for the Cu target. The occurrence of the different ions is explained in the context of their bond strengths obtained from density functional theory calculations. The energy spectra generally contain the known low-energy peak corresponding to the plasma potential. Differently extended high-energy tails due to sputtered material were observed for the different targets. Besides these, high-energetic ions were detected with up to several 100 eV. Their energies are significantly different for Ar+ and O+ with Ar+ strongly depending on the target material. The spectra are discussed together with results from transport of ions in matter (TRIM) calculation to elucidate the origin of these energetic ions." @default.
• W2042019356 created "2016-06-24" @default.
• W2042019356 creator A5003032040 @default.
• W2042019356 creator A5047101532 @default.
• W2042019356 creator A5079239172 @default.
• W2042019356 date "2011-04-01" @default.
• W2042019356 modified "2023-09-23" @default.
• W2042019356 title "Ion distribution measurements to probe target and plasma processes in electronegative magnetron discharges. II. Positive ions" @default.
• W2042019356 cites W1588895907 @default.
• W2042019356 cites W1968428741 @default.
• W2042019356 cites W1980929018 @default.
• W2042019356 cites W1982322527 @default.
• W2042019356 cites W1989374419 @default.
• W2042019356 cites W1989584263 @default.
• W2042019356 cites W1990218632 @default.
• W2042019356 cites W2011919472 @default.
• W2042019356 cites W2013054039 @default.
• W2042019356 cites W2017465681 @default.
• W2042019356 cites W2018677613 @default.
• W2042019356 cites W2023271753 @default.
• W2042019356 cites W2026142059 @default.
• W2042019356 cites W2028786291 @default.
• W2042019356 cites W2030583379 @default.
• W2042019356 cites W2031432227 @default.
• W2042019356 cites W2044490585 @default.
• W2042019356 cites W2046640010 @default.
• W2042019356 cites W2050199135 @default.
• W2042019356 cites W2052881567 @default.
• W2042019356 cites W2052974190 @default.
• W2042019356 cites W2057815662 @default.
• W2042019356 cites W2065649243 @default.
• W2042019356 cites W2070541631 @default.
• W2042019356 cites W2077482746 @default.
• W2042019356 cites W2083154543 @default.
• W2042019356 cites W2086515046 @default.
• W2042019356 cites W2089011014 @default.
• W2042019356 cites W2095267877 @default.
• W2042019356 cites W2096277584 @default.
• W2042019356 cites W2143981217 @default.
• W2042019356 cites W2146474896 @default.
• W2042019356 cites W2335606392 @default.
• W2042019356 cites W4244728800 @default.
• W2042019356 cites W4255892037 @default.
• W2042019356 doi "https://doi.org/10.1063/1.3553847" @default.
• W2042019356 hasPublicationYear "2011" @default.
• W2042019356 type Work @default.
• W2042019356 sameAs 2042019356 @default.
• W2042019356 citedByCount "13" @default.
• W2042019356 countsByYear W20420193562012 @default.
• W2042019356 countsByYear W20420193562013 @default.
• W2042019356 countsByYear W20420193562014 @default.
• W2042019356 countsByYear W20420193562015 @default.
• W2042019356 countsByYear W20420193562017 @default.
• W2042019356 countsByYear W20420193562019 @default.
• W2042019356 countsByYear W20420193562020 @default.
• W2042019356 countsByYear W20420193562023 @default.
• W2042019356 crossrefType "journal-article" @default.
• W2042019356 hasAuthorship W2042019356A5003032040 @default.
• W2042019356 hasAuthorship W2042019356A5047101532 @default.
• W2042019356 hasAuthorship W2042019356A5079239172 @default.
• W2042019356 hasConcept C113196181 @default.
• W2042019356 hasConcept C121332964 @default.
• W2042019356 hasConcept C123408415 @default.
• W2042019356 hasConcept C1276947 @default.
• W2042019356 hasConcept C145148216 @default.
• W2042019356 hasConcept C151730666 @default.
• W2042019356 hasConcept C162356407 @default.
• W2042019356 hasConcept C171250308 @default.
• W2042019356 hasConcept C178790620 @default.
• W2042019356 hasConcept C184779094 @default.
• W2042019356 hasConcept C185592680 @default.
• W2042019356 hasConcept C19067145 @default.
• W2042019356 hasConcept C192562407 @default.
• W2042019356 hasConcept C22423302 @default.
• W2042019356 hasConcept C2779343474 @default.
• W2042019356 hasConcept C40325409 @default.
• W2042019356 hasConcept C43617362 @default.
• W2042019356 hasConcept C4839761 @default.
• W2042019356 hasConcept C61427134 @default.
• W2042019356 hasConcept C62520636 @default.
• W2042019356 hasConcept C82706917 @default.
• W2042019356 hasConcept C86803240 @default.
• W2042019356 hasConceptScore W2042019356C113196181 @default.
• W2042019356 hasConceptScore W2042019356C121332964 @default.
• W2042019356 hasConceptScore W2042019356C123408415 @default.
• W2042019356 hasConceptScore W2042019356C1276947 @default.
• W2042019356 hasConceptScore W2042019356C145148216 @default.
• W2042019356 hasConceptScore W2042019356C151730666 @default.
• W2042019356 hasConceptScore W2042019356C162356407 @default.
• W2042019356 hasConceptScore W2042019356C171250308 @default.
• W2042019356 hasConceptScore W2042019356C178790620 @default.
• W2042019356 hasConceptScore W2042019356C184779094 @default.
• W2042019356 hasConceptScore W2042019356C185592680 @default.
• W2042019356 hasConceptScore W2042019356C19067145 @default.
• W2042019356 hasConceptScore W2042019356C192562407 @default.
• W2042019356 hasConceptScore W2042019356C22423302 @default.
• W2042019356 hasConceptScore W2042019356C2779343474 @default.
• W2042019356 hasConceptScore W2042019356C40325409 @default.
• W2042019356 hasConceptScore W2042019356C43617362 @default.
• W2042019356 hasConceptScore W2042019356C4839761 @default.

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