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- W2042044408 abstract "Single‐wavelength in situ ellipsomeny shows that the interface formed during the deposition of silicon nitride using an electron‐cyclotron resonance nitrogen plasma source with silane introduced downstream is created by the initial nitridation reaction of the substrate. Angle‐dependent X‐ray photoelectron spectroscopy shows that the nitridation of GaAs forms a GaN layer separated from the substrate by a layer with As‐N bonds, and spectroscopic ellipsometry indicates that the GaN layer has a large void fraction. Interface‐state densities in the low range measured on capacitors did not change significantly if a Si interface control layer 0.8–2 nm thick was deposited on cleaved GaAs(110) surfaces prior to silicon nitride deposition. © 2000 The Electrochemical Society. All rights reserved." @default.
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- W2042044408 date "2000-01-01" @default.
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- W2042044408 title "Characterization of GaAs(110) Nitrided by an Electron-Cyclotron Resonance Plasma Source Using N[sub 2]" @default.
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- W2042044408 doi "https://doi.org/10.1149/1.1393260" @default.
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