FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2042135160> ?p ?o ?g. }

• W2042135160 endingPage "4983" @default.
• W2042135160 startingPage "4975" @default.
• W2042135160 abstract "The gas-phase kinetics of the reaction of tetrakis(dimethylamido)titanium (Ti(NMe2)4) with NH3 have been measured using a flow tube reactor and FTIR spectrometer. Ti(NMe2)4 reacts rapidly with NH3 in a transamination reaction to form HNMe2 as a direct product. The bimolecular rate constant for the reaction of Ti(NMe2)4 with NH3 at 24 °C is k = (1.2 ± 0.2) × 10-16 cm3 molecules-1 s-1. A primary kinetic isotope effect of kH/kD = 2.6 ± 0.4 is observed with ND3 indicating that cleavage of an N−H bond is the rate limiting step. Therefore the rate constant is assigned to the initial transamination reaction with NH3. The temperature dependence of the rate constant gives activation parameters of log(𝒜) = −10.0 ± 0.2 (ΔS† = −19 cal/(mol K)) and Ea = 8.1 ± 0.1 kcal/mol (ΔH† = 6.9 ± 0.1 kcal/mol). When excess HNMe2 is added to the gas flow, the reaction rate is strongly suppressed. This is evidence for a reversible initial transamination reaction: Ti(NMe2)4 + NH3 ⇄ (Me2N)3Ti−NH2 + HNMe2. The proposed mechanism for subsequent reaction is elimination of HNMe2: (Me2N)3Ti−NH2 → (Me2N)2TiNH + HNMe2. From the dependence of the observed rate constant on HNMe2, the branching ratio is obtained for the above elimination reaction versus reaction with HNMe2: (Me2N)3Ti−NH2 + HNMe2 → Ti(NMe2)4 + NH3. The relevance of these results to the chemical vapor deposition of TiN by this chemistry is discussed." @default.
• W2042135160 created "2016-06-24" @default.
• W2042135160 creator A5022474323 @default.
• W2042135160 date "1996-01-01" @default.
• W2042135160 modified "2023-09-30" @default.
• W2042135160 title "Chemical Vapor Deposition of TiN from Tetrakis(dimethylamido)titanium and Ammonia: Kinetics and Mechanistic Studies of the Gas-Phase Chemistry" @default.
• W2042135160 cites W1508180688 @default.
• W2042135160 cites W1963988967 @default.
• W2042135160 cites W1967910593 @default.
• W2042135160 cites W1971955025 @default.
• W2042135160 cites W1972980261 @default.
• W2042135160 cites W1973345440 @default.
• W2042135160 cites W1989705149 @default.
• W2042135160 cites W1990329259 @default.
• W2042135160 cites W1992830597 @default.
• W2042135160 cites W2000255916 @default.
• W2042135160 cites W2005098131 @default.
• W2042135160 cites W2010012358 @default.
• W2042135160 cites W2012582669 @default.
• W2042135160 cites W2015677125 @default.
• W2042135160 cites W2024845903 @default.
• W2042135160 cites W2024900536 @default.
• W2042135160 cites W2027720492 @default.
• W2042135160 cites W2027799008 @default.
• W2042135160 cites W2031009106 @default.
• W2042135160 cites W2036862345 @default.
• W2042135160 cites W2042668277 @default.
• W2042135160 cites W2047956112 @default.
• W2042135160 cites W2059028874 @default.
• W2042135160 cites W2060842261 @default.
• W2042135160 cites W2064120059 @default.
• W2042135160 cites W2074981880 @default.
• W2042135160 cites W2076168474 @default.
• W2042135160 cites W2078030149 @default.
• W2042135160 cites W2083599374 @default.
• W2042135160 cites W2126471860 @default.
• W2042135160 cites W2156056979 @default.
• W2042135160 cites W2164688788 @default.
• W2042135160 cites W2950429943 @default.
• W2042135160 cites W2951013911 @default.
• W2042135160 doi "https://doi.org/10.1021/ja953468o" @default.
• W2042135160 hasPublicationYear "1996" @default.
• W2042135160 type Work @default.
• W2042135160 sameAs 2042135160 @default.
• W2042135160 citedByCount "74" @default.
• W2042135160 countsByYear W20421351602012 @default.
• W2042135160 countsByYear W20421351602013 @default.
• W2042135160 countsByYear W20421351602014 @default.
• W2042135160 countsByYear W20421351602015 @default.
• W2042135160 countsByYear W20421351602016 @default.
• W2042135160 countsByYear W20421351602017 @default.
• W2042135160 countsByYear W20421351602018 @default.
• W2042135160 countsByYear W20421351602019 @default.
• W2042135160 countsByYear W20421351602020 @default.
• W2042135160 countsByYear W20421351602022 @default.
• W2042135160 crossrefType "journal-article" @default.
• W2042135160 hasAuthorship W2042135160A5022474323 @default.
• W2042135160 hasConcept C121332964 @default.
• W2042135160 hasConcept C147789679 @default.
• W2042135160 hasConcept C148898269 @default.
• W2042135160 hasConcept C161790260 @default.
• W2042135160 hasConcept C175113610 @default.
• W2042135160 hasConcept C178790620 @default.
• W2042135160 hasConcept C179104552 @default.
• W2042135160 hasConcept C181199279 @default.
• W2042135160 hasConcept C185592680 @default.
• W2042135160 hasConcept C36663273 @default.
• W2042135160 hasConcept C506065880 @default.
• W2042135160 hasConcept C525849907 @default.
• W2042135160 hasConcept C58364064 @default.
• W2042135160 hasConcept C62520636 @default.
• W2042135160 hasConcept C65024703 @default.
• W2042135160 hasConcept C68793091 @default.
• W2042135160 hasConcept C69928629 @default.
• W2042135160 hasConcept C93391505 @default.
• W2042135160 hasConceptScore W2042135160C121332964 @default.
• W2042135160 hasConceptScore W2042135160C147789679 @default.
• W2042135160 hasConceptScore W2042135160C148898269 @default.
• W2042135160 hasConceptScore W2042135160C161790260 @default.
• W2042135160 hasConceptScore W2042135160C175113610 @default.
• W2042135160 hasConceptScore W2042135160C178790620 @default.
• W2042135160 hasConceptScore W2042135160C179104552 @default.
• W2042135160 hasConceptScore W2042135160C181199279 @default.
• W2042135160 hasConceptScore W2042135160C185592680 @default.
• W2042135160 hasConceptScore W2042135160C36663273 @default.
• W2042135160 hasConceptScore W2042135160C506065880 @default.
• W2042135160 hasConceptScore W2042135160C525849907 @default.
• W2042135160 hasConceptScore W2042135160C58364064 @default.
• W2042135160 hasConceptScore W2042135160C62520636 @default.
• W2042135160 hasConceptScore W2042135160C65024703 @default.
• W2042135160 hasConceptScore W2042135160C68793091 @default.
• W2042135160 hasConceptScore W2042135160C69928629 @default.
• W2042135160 hasConceptScore W2042135160C93391505 @default.
• W2042135160 hasIssue "21" @default.
• W2042135160 hasLocation W20421351601 @default.
• W2042135160 hasOpenAccess W2042135160 @default.
• W2042135160 hasPrimaryLocation W20421351601 @default.
• W2042135160 hasRelatedWork W1588340770 @default.

• next