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- W2042370507 endingPage "4947" @default.
- W2042370507 startingPage "4943" @default.
- W2042370507 abstract "The growth of very thin (15–80 Å) oxides on polycrystalline silicon films at 850–1050 °C in 10−3 atm oxygen partial pressure diluted by nitrogen is studied by ellipsometry. The oxidation kinetics are explained by the inverse-logarithmic law which governs very thin oxide growth on single- crystal silicon. The Arrhenius expression which can be evaluated from the oxidation velocity has a break point about 900 °C. The high temperature activation energy roughly coincides with that of single-crystal silicon." @default.
- W2042370507 created "2016-06-24" @default.
- W2042370507 creator A5047751313 @default.
- W2042370507 date "1982-07-01" @default.
- W2042370507 modified "2023-10-10" @default.
- W2042370507 title "Formation of thin oxide on polycrystalline silicon" @default.
- W2042370507 cites W1984465851 @default.
- W2042370507 cites W1986321992 @default.
- W2042370507 cites W1988601510 @default.
- W2042370507 cites W2005227295 @default.
- W2042370507 cites W2024957718 @default.
- W2042370507 cites W2038551630 @default.
- W2042370507 cites W2051511427 @default.
- W2042370507 cites W2090166502 @default.
- W2042370507 cites W2093914900 @default.
- W2042370507 cites W2161607197 @default.
- W2042370507 cites W2171106615 @default.
- W2042370507 doi "https://doi.org/10.1063/1.331329" @default.
- W2042370507 hasPublicationYear "1982" @default.
- W2042370507 type Work @default.
- W2042370507 sameAs 2042370507 @default.
- W2042370507 citedByCount "3" @default.
- W2042370507 crossrefType "journal-article" @default.
- W2042370507 hasAuthorship W2042370507A5047751313 @default.
- W2042370507 hasConcept C113196181 @default.
- W2042370507 hasConcept C137637335 @default.
- W2042370507 hasConcept C147789679 @default.
- W2042370507 hasConcept C171250308 @default.
- W2042370507 hasConcept C178790620 @default.
- W2042370507 hasConcept C185592680 @default.
- W2042370507 hasConcept C19067145 @default.
- W2042370507 hasConcept C191897082 @default.
- W2042370507 hasConcept C192562407 @default.
- W2042370507 hasConcept C2776390347 @default.
- W2042370507 hasConcept C2779227376 @default.
- W2042370507 hasConcept C2779667780 @default.
- W2042370507 hasConcept C2779851234 @default.
- W2042370507 hasConcept C2780565262 @default.
- W2042370507 hasConcept C43617362 @default.
- W2042370507 hasConcept C540031477 @default.
- W2042370507 hasConcept C544956773 @default.
- W2042370507 hasConcept C68463220 @default.
- W2042370507 hasConcept C73922627 @default.
- W2042370507 hasConcept C80086925 @default.
- W2042370507 hasConcept C8010536 @default.
- W2042370507 hasConcept C86183883 @default.
- W2042370507 hasConcept C87359718 @default.
- W2042370507 hasConcept C95121573 @default.
- W2042370507 hasConceptScore W2042370507C113196181 @default.
- W2042370507 hasConceptScore W2042370507C137637335 @default.
- W2042370507 hasConceptScore W2042370507C147789679 @default.
- W2042370507 hasConceptScore W2042370507C171250308 @default.
- W2042370507 hasConceptScore W2042370507C178790620 @default.
- W2042370507 hasConceptScore W2042370507C185592680 @default.
- W2042370507 hasConceptScore W2042370507C19067145 @default.
- W2042370507 hasConceptScore W2042370507C191897082 @default.
- W2042370507 hasConceptScore W2042370507C192562407 @default.
- W2042370507 hasConceptScore W2042370507C2776390347 @default.
- W2042370507 hasConceptScore W2042370507C2779227376 @default.
- W2042370507 hasConceptScore W2042370507C2779667780 @default.
- W2042370507 hasConceptScore W2042370507C2779851234 @default.
- W2042370507 hasConceptScore W2042370507C2780565262 @default.
- W2042370507 hasConceptScore W2042370507C43617362 @default.
- W2042370507 hasConceptScore W2042370507C540031477 @default.
- W2042370507 hasConceptScore W2042370507C544956773 @default.
- W2042370507 hasConceptScore W2042370507C68463220 @default.
- W2042370507 hasConceptScore W2042370507C73922627 @default.
- W2042370507 hasConceptScore W2042370507C80086925 @default.
- W2042370507 hasConceptScore W2042370507C8010536 @default.
- W2042370507 hasConceptScore W2042370507C86183883 @default.
- W2042370507 hasConceptScore W2042370507C87359718 @default.
- W2042370507 hasConceptScore W2042370507C95121573 @default.
- W2042370507 hasIssue "7" @default.
- W2042370507 hasLocation W20423705071 @default.
- W2042370507 hasOpenAccess W2042370507 @default.
- W2042370507 hasPrimaryLocation W20423705071 @default.
- W2042370507 hasRelatedWork W1976189486 @default.
- W2042370507 hasRelatedWork W1984223439 @default.
- W2042370507 hasRelatedWork W1992018834 @default.
- W2042370507 hasRelatedWork W2002961403 @default.
- W2042370507 hasRelatedWork W2010139348 @default.
- W2042370507 hasRelatedWork W2085776017 @default.
- W2042370507 hasRelatedWork W2112889503 @default.
- W2042370507 hasRelatedWork W2145041847 @default.
- W2042370507 hasRelatedWork W2351166715 @default.
- W2042370507 hasRelatedWork W3029932088 @default.
- W2042370507 hasVolume "53" @default.
- W2042370507 isParatext "false" @default.
- W2042370507 isRetracted "false" @default.
- W2042370507 magId "2042370507" @default.
- W2042370507 workType "article" @default.