Matches in SemOpenAlex for { <https://semopenalex.org/work/W2042515516> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W2042515516 abstract "The relative roles of ion bombardment and oxygen radicals have been examined for oxygen plasma etching of common photoresists and silicon containing resists. The degree of oxygen dissociation in the plasma has been measured as a function of power and pressure in the reactor. Etch rates for hydrocarbon resists increase with pressure over the range studied, although the ion bombardment energy and the flux of oxygen radicals decrease. This indicates that the supply of neutral oxygen molecules is the limiting factor in the range of operating conditions (20 to 80 mtorr) typically found in reactive ion etching (RIE). The role of ion induced damage is small for standard resist etching but the damage aids in the formation of an oxide layer when etching silicon containing materials." @default.
- W2042515516 created "2016-06-24" @default.
- W2042515516 creator A5015222297 @default.
- W2042515516 creator A5058145238 @default.
- W2042515516 creator A5065400711 @default.
- W2042515516 creator A5083494272 @default.
- W2042515516 date "1988-01-01" @default.
- W2042515516 modified "2023-10-16" @default.
- W2042515516 title "Effects Of Ion Bombardment In Oxygen Plasma Etching" @default.
- W2042515516 doi "https://doi.org/10.1117/12.968308" @default.
- W2042515516 hasPublicationYear "1988" @default.
- W2042515516 type Work @default.
- W2042515516 sameAs 2042515516 @default.
- W2042515516 citedByCount "1" @default.
- W2042515516 countsByYear W20425155162018 @default.
- W2042515516 crossrefType "proceedings-article" @default.
- W2042515516 hasAuthorship W2042515516A5015222297 @default.
- W2042515516 hasAuthorship W2042515516A5058145238 @default.
- W2042515516 hasAuthorship W2042515516A5065400711 @default.
- W2042515516 hasAuthorship W2042515516A5083494272 @default.
- W2042515516 hasConcept C100460472 @default.
- W2042515516 hasConcept C102931765 @default.
- W2042515516 hasConcept C107187091 @default.
- W2042515516 hasConcept C107872376 @default.
- W2042515516 hasConcept C113196181 @default.
- W2042515516 hasConcept C121332964 @default.
- W2042515516 hasConcept C130472188 @default.
- W2042515516 hasConcept C139066938 @default.
- W2042515516 hasConcept C145148216 @default.
- W2042515516 hasConcept C145738678 @default.
- W2042515516 hasConcept C147789679 @default.
- W2042515516 hasConcept C171250308 @default.
- W2042515516 hasConcept C178790620 @default.
- W2042515516 hasConcept C185592680 @default.
- W2042515516 hasConcept C192562407 @default.
- W2042515516 hasConcept C2779227376 @default.
- W2042515516 hasConcept C30646810 @default.
- W2042515516 hasConcept C49040817 @default.
- W2042515516 hasConcept C53524968 @default.
- W2042515516 hasConcept C540031477 @default.
- W2042515516 hasConcept C544956773 @default.
- W2042515516 hasConcept C62520636 @default.
- W2042515516 hasConcept C82706917 @default.
- W2042515516 hasConcept C97355855 @default.
- W2042515516 hasConceptScore W2042515516C100460472 @default.
- W2042515516 hasConceptScore W2042515516C102931765 @default.
- W2042515516 hasConceptScore W2042515516C107187091 @default.
- W2042515516 hasConceptScore W2042515516C107872376 @default.
- W2042515516 hasConceptScore W2042515516C113196181 @default.
- W2042515516 hasConceptScore W2042515516C121332964 @default.
- W2042515516 hasConceptScore W2042515516C130472188 @default.
- W2042515516 hasConceptScore W2042515516C139066938 @default.
- W2042515516 hasConceptScore W2042515516C145148216 @default.
- W2042515516 hasConceptScore W2042515516C145738678 @default.
- W2042515516 hasConceptScore W2042515516C147789679 @default.
- W2042515516 hasConceptScore W2042515516C171250308 @default.
- W2042515516 hasConceptScore W2042515516C178790620 @default.
- W2042515516 hasConceptScore W2042515516C185592680 @default.
- W2042515516 hasConceptScore W2042515516C192562407 @default.
- W2042515516 hasConceptScore W2042515516C2779227376 @default.
- W2042515516 hasConceptScore W2042515516C30646810 @default.
- W2042515516 hasConceptScore W2042515516C49040817 @default.
- W2042515516 hasConceptScore W2042515516C53524968 @default.
- W2042515516 hasConceptScore W2042515516C540031477 @default.
- W2042515516 hasConceptScore W2042515516C544956773 @default.
- W2042515516 hasConceptScore W2042515516C62520636 @default.
- W2042515516 hasConceptScore W2042515516C82706917 @default.
- W2042515516 hasConceptScore W2042515516C97355855 @default.
- W2042515516 hasLocation W20425155161 @default.
- W2042515516 hasOpenAccess W2042515516 @default.
- W2042515516 hasPrimaryLocation W20425155161 @default.
- W2042515516 hasRelatedWork W1544774047 @default.
- W2042515516 hasRelatedWork W1989017561 @default.
- W2042515516 hasRelatedWork W2022949630 @default.
- W2042515516 hasRelatedWork W2049342529 @default.
- W2042515516 hasRelatedWork W2059112004 @default.
- W2042515516 hasRelatedWork W2068600483 @default.
- W2042515516 hasRelatedWork W2139606557 @default.
- W2042515516 hasRelatedWork W2164353131 @default.
- W2042515516 hasRelatedWork W2765886561 @default.
- W2042515516 hasRelatedWork W3197419717 @default.
- W2042515516 isParatext "false" @default.
- W2042515516 isRetracted "false" @default.
- W2042515516 magId "2042515516" @default.
- W2042515516 workType "article" @default.