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• W2042679321 abstract "TiO2 thin films were deposited by e-beam and the refractive index and extinction coefficient of the films were measured. When the oxygen pressure increases from 1.3 × 10− 5 to 2.2 × 10− 4 Torr, while the substrate temperature (300 ± 10 °C) and the depositing rate (0.1 nm/s) were kept constant, the refractive index of the films decreases from 2.41 to 2.12 (at λ = 550 nm). The structures of the films were investigated by X-ray Diffraction (XRD) and Atomic Force Microscopy (AFM). XRD measurements revealed that the films deposited in a higher substrate temperature (300 ± 10°C) were partially crystalline. The AFM investigation confirmed that lower oxygen pressure, higher deposition rate and higher substrate temperature produce a higher surface roughness of TiO2 film. When the deposition rate (0.1 nm/s) and the substrate temperature (300 ± 10 °C) were kept constant, and the oxygen pressure was varied from 1.3 × 10− 5 to 2.2 × 10− 4 Torr, the roughness (Root-Mean-Square) of as-deposited films was changed from 3.53 to 1.91 nm." @default.
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• W2042679321 date "2007-02-01" @default.
• W2042679321 modified "2023-09-28" @default.
• W2042679321 title "Optical and structural properties of TiO2 films deposited from Ti3O5 by electron beam" @default.
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• W2042679321 doi "https://doi.org/10.1016/j.surfcoat.2006.07.037" @default.
• W2042679321 hasPublicationYear "2007" @default.
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