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• W2042740187 abstract "Dark-field inline electron holography has recently been established as a convenient method to map strain in semiconductor devices, combining high precision, low noise, sub-nm spatial resolution and fields-of-view larger than 1 μm. Here we compare two approaches to reconstruct the geometric phase from a transmission electron microscopy dark-field focal series and their effects on the strain measurement: the transport-of-intensity-equation (TIE) and a flux-preserving iterative approach. For this task, we used a GaN-based light emitting diode with a highly complex heterostructure as a model system. While the TIE relies on 3 images only but requires the optimization of two free parameters (defocus step and low-limit cut-off frequency), the iterative reconstruction algorithm involves no adjustable parameters and uses images recorded at 9 different planes of focus with quadratically increasing defocus values. Optimum parameters for the TIE-reconstruction could be identified. However, the iterative phase retrieval approach yields the strain values that agree best with the expected strain levels and provides also higher spatial resolution." @default.
• W2042740187 created "2016-06-24" @default.
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• W2042740187 date "2013-04-01" @default.
• W2042740187 modified "2023-09-27" @default.
• W2042740187 title "Strain mapping of LED devices by dark-field inline electron holography: Comparison between deterministic and iterative phase retrieval approaches" @default.
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• W2042740187 doi "https://doi.org/10.1016/j.ultramic.2012.07.010" @default.
• W2042740187 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/22910615" @default.
• W2042740187 hasPublicationYear "2013" @default.
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