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• W2042768639 abstract "We report on use of cavity ring-down spectroscopy (CRDS) as a means to detect and quantify ion sputtering of refractory metal species. CRDS measurements are made with a neodymium:YAG-pumped optical parametric oscillator laser system in the 375-400 nm region. CRDS sputtering measurements are presented for argon ions incident on iron, aluminum, molybdenum, and titanium. The measurements are based on absorption from fine-structure levels of the electronic ground-state multiplets. For each species, characteristic spectra are provided, the dependence of sputtered particle number density on the beam current is examined, measured densities are compared with a sputter model, and detection limits are determined. For iron, aluminum, and titanium we probe multiple fine-structure levels within the ground-state multiplet and obtain information on their relative populations." @default.
• W2042768639 created "2016-06-24" @default.
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• W2042768639 date "2005-10-20" @default.
• W2042768639 modified "2023-10-10" @default.
• W2042768639 title "Detection of sputtered metals with cavity ring-down spectroscopy" @default.
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• W2042768639 doi "https://doi.org/10.1364/ao.44.006496" @default.
• W2042768639 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/16252662" @default.
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