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- W204294472 abstract "An electron beam probing system using secondary electrons and stroboscopic technique has been developed for internal testing of high speed LSIs. This system can measure voltage waveforms of LSI internal electrodes with 100 ps time resolution. It has been applied to the internal diagnosis of a fast ECL IC.The rise, fall and propagation delay times have been evaluated." @default.
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- W204294472 date "1984-10-16" @default.
- W204294472 modified "2023-09-23" @default.
- W204294472 title "Electron beam prober for LSI testing with 100 ps time resolution" @default.
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