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- W2043114885 abstract "p-Type ZnO thin films were prepared by oxidation of Zn3N2 thin films. The Zn3N2 thin films were deposited by reactive DC magnetron sputtering using pure zinc disk as target and Ar–N2 mixture as working gas. For oxidation temperature between 350°C and 500°C, p-type ZnO thin films were obtained, with a hole concentration as high as 5.78×1017 cm−3 at 500°C, but for oxidation temperature at 550°C, n-type ZnO film was obtained." @default.
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- W2043114885 date "2003-12-01" @default.
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- W2043114885 title "p-Type ZnO thin films prepared by oxidation of Zn3N2 thin films deposited by DC magnetron sputtering" @default.
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- W2043114885 doi "https://doi.org/10.1016/j.jcrysgro.2003.07.002" @default.
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