Matches in SemOpenAlex for { <https://semopenalex.org/work/W2043239377> ?p ?o ?g. }
- W2043239377 endingPage "277" @default.
- W2043239377 startingPage "269" @default.
- W2043239377 abstract "Abstract This review is directed toward some of the recent developments in the analysis of lattice disorder in ion-implanted silicon. Although the disorder picture has not been entirely clarified in silicon, many of the salient features have been identified. IR absorption and EPR measurements have been used to identify specific defects and correlation was found with anneal behavior in implanted and fast-neutron irradiated samples. Analysis of low temperature implants suggested that release of point defects (vacancies) played an important role in the growth of divacancies and the anneal of disorder. Depth distribution of defects have been investigated and compared with ion ranges and energy lost in atomic processes. Various models have been proposed for the nature of the disordered region around the ion track and the formation of an amorphous layer at high doses. The data indicates that the individual disordered regions are not primarily amorphous. The nature of ion implanted layers in compound semiconductors have not yet been as thoroughly investigated as those in silicon." @default.
- W2043239377 created "2016-06-24" @default.
- W2043239377 creator A5081715399 @default.
- W2043239377 date "1971-04-01" @default.
- W2043239377 modified "2023-10-16" @default.
- W2043239377 title "Ion implantation-lattice disorder" @default.
- W2043239377 cites W1963549980 @default.
- W2043239377 cites W1968404955 @default.
- W2043239377 cites W1974367654 @default.
- W2043239377 cites W1976583507 @default.
- W2043239377 cites W1984531181 @default.
- W2043239377 cites W1994951206 @default.
- W2043239377 cites W2004804635 @default.
- W2043239377 cites W2006491443 @default.
- W2043239377 cites W2025381833 @default.
- W2043239377 cites W2026024778 @default.
- W2043239377 cites W2031506795 @default.
- W2043239377 cites W2038391440 @default.
- W2043239377 cites W2041856109 @default.
- W2043239377 cites W2054023593 @default.
- W2043239377 cites W2057631282 @default.
- W2043239377 cites W2065170836 @default.
- W2043239377 cites W2065258228 @default.
- W2043239377 cites W2069429706 @default.
- W2043239377 cites W2075397996 @default.
- W2043239377 cites W2084910609 @default.
- W2043239377 cites W2086530237 @default.
- W2043239377 cites W2086559718 @default.
- W2043239377 cites W2086879638 @default.
- W2043239377 cites W2095263264 @default.
- W2043239377 cites W2116154944 @default.
- W2043239377 doi "https://doi.org/10.1080/00337577108231040" @default.
- W2043239377 hasPublicationYear "1971" @default.
- W2043239377 type Work @default.
- W2043239377 sameAs 2043239377 @default.
- W2043239377 citedByCount "20" @default.
- W2043239377 countsByYear W20432393772016 @default.
- W2043239377 countsByYear W20432393772022 @default.
- W2043239377 crossrefType "journal-article" @default.
- W2043239377 hasAuthorship W2043239377A5081715399 @default.
- W2043239377 hasConcept C108225325 @default.
- W2043239377 hasConcept C111337013 @default.
- W2043239377 hasConcept C121332964 @default.
- W2043239377 hasConcept C145148216 @default.
- W2043239377 hasConcept C164675345 @default.
- W2043239377 hasConcept C178790620 @default.
- W2043239377 hasConcept C185544564 @default.
- W2043239377 hasConcept C185592680 @default.
- W2043239377 hasConcept C187961010 @default.
- W2043239377 hasConcept C192562407 @default.
- W2043239377 hasConcept C24890656 @default.
- W2043239377 hasConcept C26873012 @default.
- W2043239377 hasConcept C2776390347 @default.
- W2043239377 hasConcept C2779667780 @default.
- W2043239377 hasConcept C2781204021 @default.
- W2043239377 hasConcept C41823505 @default.
- W2043239377 hasConcept C46141821 @default.
- W2043239377 hasConcept C49040817 @default.
- W2043239377 hasConcept C544956773 @default.
- W2043239377 hasConcept C56052488 @default.
- W2043239377 hasConcept C8010536 @default.
- W2043239377 hasConceptScore W2043239377C108225325 @default.
- W2043239377 hasConceptScore W2043239377C111337013 @default.
- W2043239377 hasConceptScore W2043239377C121332964 @default.
- W2043239377 hasConceptScore W2043239377C145148216 @default.
- W2043239377 hasConceptScore W2043239377C164675345 @default.
- W2043239377 hasConceptScore W2043239377C178790620 @default.
- W2043239377 hasConceptScore W2043239377C185544564 @default.
- W2043239377 hasConceptScore W2043239377C185592680 @default.
- W2043239377 hasConceptScore W2043239377C187961010 @default.
- W2043239377 hasConceptScore W2043239377C192562407 @default.
- W2043239377 hasConceptScore W2043239377C24890656 @default.
- W2043239377 hasConceptScore W2043239377C26873012 @default.
- W2043239377 hasConceptScore W2043239377C2776390347 @default.
- W2043239377 hasConceptScore W2043239377C2779667780 @default.
- W2043239377 hasConceptScore W2043239377C2781204021 @default.
- W2043239377 hasConceptScore W2043239377C41823505 @default.
- W2043239377 hasConceptScore W2043239377C46141821 @default.
- W2043239377 hasConceptScore W2043239377C49040817 @default.
- W2043239377 hasConceptScore W2043239377C544956773 @default.
- W2043239377 hasConceptScore W2043239377C56052488 @default.
- W2043239377 hasConceptScore W2043239377C8010536 @default.
- W2043239377 hasIssue "3-4" @default.
- W2043239377 hasLocation W20432393771 @default.
- W2043239377 hasOpenAccess W2043239377 @default.
- W2043239377 hasPrimaryLocation W20432393771 @default.
- W2043239377 hasRelatedWork W1976614902 @default.
- W2043239377 hasRelatedWork W1997038225 @default.
- W2043239377 hasRelatedWork W2003719873 @default.
- W2043239377 hasRelatedWork W2009819460 @default.
- W2043239377 hasRelatedWork W2041833038 @default.
- W2043239377 hasRelatedWork W2044236528 @default.
- W2043239377 hasRelatedWork W2061728122 @default.
- W2043239377 hasRelatedWork W2065793074 @default.
- W2043239377 hasRelatedWork W2087168628 @default.
- W2043239377 hasRelatedWork W2790868607 @default.
- W2043239377 hasVolume "8" @default.
- W2043239377 isParatext "false" @default.