Matches in SemOpenAlex for { <https://semopenalex.org/work/W2043284894> ?p ?o ?g. }
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with 100 items per page.
- W2043284894 endingPage "311" @default.
- W2043284894 startingPage "309" @default.
- W2043284894 abstract "A new Self-Aligned Isolation process using thin-metal Lift-off (SAIL) has been developed for NMOS VLSI circuits. In this process, a field oxide is grown first, followed by a channel-stop implant that is self-aligned to the active area. The self-alignment is achieved through a lift-off process that utilizes only thin metal. The self-alignment of channel-stop implant to active area is shown to improve the breakdown voltage of MOSFET devices. Direct window isolation is used to eliminate oxide encroachment and reduce outdiffusion of boron channel-stop implant into the active area. As a result, the narrow width effect is minimal. Since thin-metal lift-off can be performed reproducibly with high yield, this makes SAIL a viable process for VLSI fabrication." @default.
- W2043284894 created "2016-06-24" @default.
- W2043284894 creator A5000436835 @default.
- W2043284894 creator A5015437593 @default.
- W2043284894 creator A5035051594 @default.
- W2043284894 creator A5037063155 @default.
- W2043284894 creator A5050124976 @default.
- W2043284894 date "1987-07-01" @default.
- W2043284894 modified "2023-09-23" @default.
- W2043284894 title "A new self-aligned VLSI Isolation process using thin-metal lift-off" @default.
- W2043284894 cites W1978573283 @default.
- W2043284894 cites W1983859882 @default.
- W2043284894 cites W2000958511 @default.
- W2043284894 cites W2049318514 @default.
- W2043284894 cites W2072630115 @default.
- W2043284894 cites W2091558613 @default.
- W2043284894 cites W2155855430 @default.
- W2043284894 cites W2161217037 @default.
- W2043284894 doi "https://doi.org/10.1109/edl.1987.26641" @default.
- W2043284894 hasPublicationYear "1987" @default.
- W2043284894 type Work @default.
- W2043284894 sameAs 2043284894 @default.
- W2043284894 citedByCount "0" @default.
- W2043284894 crossrefType "journal-article" @default.
- W2043284894 hasAuthorship W2043284894A5000436835 @default.
- W2043284894 hasAuthorship W2043284894A5015437593 @default.
- W2043284894 hasAuthorship W2043284894A5035051594 @default.
- W2043284894 hasAuthorship W2043284894A5037063155 @default.
- W2043284894 hasAuthorship W2043284894A5050124976 @default.
- W2043284894 hasConcept C119599485 @default.
- W2043284894 hasConcept C124101348 @default.
- W2043284894 hasConcept C127413603 @default.
- W2043284894 hasConcept C134146338 @default.
- W2043284894 hasConcept C136525101 @default.
- W2043284894 hasConcept C139002025 @default.
- W2043284894 hasConcept C142724271 @default.
- W2043284894 hasConcept C14580979 @default.
- W2043284894 hasConcept C165801399 @default.
- W2043284894 hasConcept C172385210 @default.
- W2043284894 hasConcept C192562407 @default.
- W2043284894 hasConcept C197162436 @default.
- W2043284894 hasConcept C204787440 @default.
- W2043284894 hasConcept C24326235 @default.
- W2043284894 hasConcept C27050352 @default.
- W2043284894 hasConcept C2778413303 @default.
- W2043284894 hasConcept C41008148 @default.
- W2043284894 hasConcept C49040817 @default.
- W2043284894 hasConcept C71924100 @default.
- W2043284894 hasConceptScore W2043284894C119599485 @default.
- W2043284894 hasConceptScore W2043284894C124101348 @default.
- W2043284894 hasConceptScore W2043284894C127413603 @default.
- W2043284894 hasConceptScore W2043284894C134146338 @default.
- W2043284894 hasConceptScore W2043284894C136525101 @default.
- W2043284894 hasConceptScore W2043284894C139002025 @default.
- W2043284894 hasConceptScore W2043284894C142724271 @default.
- W2043284894 hasConceptScore W2043284894C14580979 @default.
- W2043284894 hasConceptScore W2043284894C165801399 @default.
- W2043284894 hasConceptScore W2043284894C172385210 @default.
- W2043284894 hasConceptScore W2043284894C192562407 @default.
- W2043284894 hasConceptScore W2043284894C197162436 @default.
- W2043284894 hasConceptScore W2043284894C204787440 @default.
- W2043284894 hasConceptScore W2043284894C24326235 @default.
- W2043284894 hasConceptScore W2043284894C27050352 @default.
- W2043284894 hasConceptScore W2043284894C2778413303 @default.
- W2043284894 hasConceptScore W2043284894C41008148 @default.
- W2043284894 hasConceptScore W2043284894C49040817 @default.
- W2043284894 hasConceptScore W2043284894C71924100 @default.
- W2043284894 hasIssue "7" @default.
- W2043284894 hasLocation W20432848941 @default.
- W2043284894 hasOpenAccess W2043284894 @default.
- W2043284894 hasPrimaryLocation W20432848941 @default.
- W2043284894 hasRelatedWork W1742453416 @default.
- W2043284894 hasRelatedWork W1898073519 @default.
- W2043284894 hasRelatedWork W1955395711 @default.
- W2043284894 hasRelatedWork W2029596085 @default.
- W2043284894 hasRelatedWork W2147297470 @default.
- W2043284894 hasRelatedWork W2483806656 @default.
- W2043284894 hasRelatedWork W2552277894 @default.
- W2043284894 hasRelatedWork W2566022972 @default.
- W2043284894 hasRelatedWork W2917530188 @default.
- W2043284894 hasRelatedWork W54061974 @default.
- W2043284894 hasVolume "8" @default.
- W2043284894 isParatext "false" @default.
- W2043284894 isRetracted "false" @default.
- W2043284894 magId "2043284894" @default.
- W2043284894 workType "article" @default.