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- W2043342413 abstract "Abstract The growth of carbon nanotube (CNT) using cobalt silicide as a catalyst and source/drain electrode is proposed to explore its feasibility for fabricating integrated-circuit process compatible, self-aligned CNT field-effect transistors (CNTFET). The silicide nanoparticles formed in the Ti/Co/poly-Si source/drain stack were used as a catalyst for CNT growth. Results show that single-walled CNTs have been synthesized between pre-defined catalytic cobalt silicide source/drain pairs by chemical vapor deposition at 800–900 °C. Preliminary transistor characteristics of the CNTFETs have also been achieved." @default.
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- W2043342413 date "2007-07-01" @default.
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- W2043342413 title "Growth of self-aligned carbon nanotube for use as a field-effect transistor using cobalt silicide as a catalyst" @default.
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- W2043342413 doi "https://doi.org/10.1016/j.carbon.2007.03.047" @default.
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