Matches in SemOpenAlex for { <https://semopenalex.org/work/W2043354338> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W2043354338 abstract "A chemical reaction chamber was designed and manufactured to grow high quality, ultra-thin films using the atomic layer deposition (ALD) technology. As the distribution of temperature and gas pressure has large influences on the thickness of sub-nanometer films, it is crucial to achieve uniformity in terms of temperature and gas flow on the substrate. We report here the design and optimization of a cross-flow structured and radiation heated chamber, with special focus on the multi-inlet and multi-outlet structures to deliver the precursors and to get better distribution uniformity. Simulations based on finite element method (FEM) are employed to optimize the structure and corresponding experiments are made to validate with the simulation results.We find that by adjusting the inlet and outlet parameters, such as the inlet numbers and diameter, it is possible to achieve better uniformity of pressure on the substrate and a narrower film thickness distribution within the chamber. Factors influencing the gas flow over the wafer surface are reported and discussed." @default.
- W2043354338 created "2016-06-24" @default.
- W2043354338 creator A5010755775 @default.
- W2043354338 creator A5014704952 @default.
- W2043354338 creator A5063514061 @default.
- W2043354338 creator A5084795179 @default.
- W2043354338 creator A5088646334 @default.
- W2043354338 date "2013-07-01" @default.
- W2043354338 modified "2023-09-22" @default.
- W2043354338 title "Optimization of inlets and outlets of an ALD chamber with radiant heating" @default.
- W2043354338 cites W2041304891 @default.
- W2043354338 cites W2048395569 @default.
- W2043354338 cites W2055776502 @default.
- W2043354338 doi "https://doi.org/10.1109/isam.2013.6643519" @default.
- W2043354338 hasPublicationYear "2013" @default.
- W2043354338 type Work @default.
- W2043354338 sameAs 2043354338 @default.
- W2043354338 citedByCount "0" @default.
- W2043354338 crossrefType "proceedings-article" @default.
- W2043354338 hasAuthorship W2043354338A5010755775 @default.
- W2043354338 hasAuthorship W2043354338A5014704952 @default.
- W2043354338 hasAuthorship W2043354338A5063514061 @default.
- W2043354338 hasAuthorship W2043354338A5084795179 @default.
- W2043354338 hasAuthorship W2043354338A5088646334 @default.
- W2043354338 hasConcept C111368507 @default.
- W2043354338 hasConcept C121332964 @default.
- W2043354338 hasConcept C127313418 @default.
- W2043354338 hasConcept C127413603 @default.
- W2043354338 hasConcept C135628077 @default.
- W2043354338 hasConcept C151730666 @default.
- W2043354338 hasConcept C159985019 @default.
- W2043354338 hasConcept C160671074 @default.
- W2043354338 hasConcept C172120300 @default.
- W2043354338 hasConcept C191897082 @default.
- W2043354338 hasConcept C192562407 @default.
- W2043354338 hasConcept C201289731 @default.
- W2043354338 hasConcept C2777289219 @default.
- W2043354338 hasConcept C2777859621 @default.
- W2043354338 hasConcept C2779227376 @default.
- W2043354338 hasConcept C2779693302 @default.
- W2043354338 hasConcept C2816523 @default.
- W2043354338 hasConcept C38349280 @default.
- W2043354338 hasConcept C49040817 @default.
- W2043354338 hasConcept C57879066 @default.
- W2043354338 hasConcept C64297162 @default.
- W2043354338 hasConcept C78519656 @default.
- W2043354338 hasConcept C86803240 @default.
- W2043354338 hasConcept C97355855 @default.
- W2043354338 hasConceptScore W2043354338C111368507 @default.
- W2043354338 hasConceptScore W2043354338C121332964 @default.
- W2043354338 hasConceptScore W2043354338C127313418 @default.
- W2043354338 hasConceptScore W2043354338C127413603 @default.
- W2043354338 hasConceptScore W2043354338C135628077 @default.
- W2043354338 hasConceptScore W2043354338C151730666 @default.
- W2043354338 hasConceptScore W2043354338C159985019 @default.
- W2043354338 hasConceptScore W2043354338C160671074 @default.
- W2043354338 hasConceptScore W2043354338C172120300 @default.
- W2043354338 hasConceptScore W2043354338C191897082 @default.
- W2043354338 hasConceptScore W2043354338C192562407 @default.
- W2043354338 hasConceptScore W2043354338C201289731 @default.
- W2043354338 hasConceptScore W2043354338C2777289219 @default.
- W2043354338 hasConceptScore W2043354338C2777859621 @default.
- W2043354338 hasConceptScore W2043354338C2779227376 @default.
- W2043354338 hasConceptScore W2043354338C2779693302 @default.
- W2043354338 hasConceptScore W2043354338C2816523 @default.
- W2043354338 hasConceptScore W2043354338C38349280 @default.
- W2043354338 hasConceptScore W2043354338C49040817 @default.
- W2043354338 hasConceptScore W2043354338C57879066 @default.
- W2043354338 hasConceptScore W2043354338C64297162 @default.
- W2043354338 hasConceptScore W2043354338C78519656 @default.
- W2043354338 hasConceptScore W2043354338C86803240 @default.
- W2043354338 hasConceptScore W2043354338C97355855 @default.
- W2043354338 hasLocation W20433543381 @default.
- W2043354338 hasOpenAccess W2043354338 @default.
- W2043354338 hasPrimaryLocation W20433543381 @default.
- W2043354338 hasRelatedWork W1518697053 @default.
- W2043354338 hasRelatedWork W1934466508 @default.
- W2043354338 hasRelatedWork W1968468451 @default.
- W2043354338 hasRelatedWork W1971097655 @default.
- W2043354338 hasRelatedWork W2025315855 @default.
- W2043354338 hasRelatedWork W2044026959 @default.
- W2043354338 hasRelatedWork W2115602968 @default.
- W2043354338 hasRelatedWork W2128142484 @default.
- W2043354338 hasRelatedWork W2135363291 @default.
- W2043354338 hasRelatedWork W2532954295 @default.
- W2043354338 hasRelatedWork W2542484231 @default.
- W2043354338 hasRelatedWork W2964832175 @default.
- W2043354338 hasRelatedWork W3013731736 @default.
- W2043354338 hasRelatedWork W3015570468 @default.
- W2043354338 hasRelatedWork W3182421504 @default.
- W2043354338 hasRelatedWork W3208030584 @default.
- W2043354338 hasRelatedWork W755218697 @default.
- W2043354338 hasRelatedWork W2516929854 @default.
- W2043354338 hasRelatedWork W2822348531 @default.
- W2043354338 hasRelatedWork W2834950968 @default.
- W2043354338 isParatext "false" @default.
- W2043354338 isRetracted "false" @default.
- W2043354338 magId "2043354338" @default.
- W2043354338 workType "article" @default.