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• W2043443996 abstract "In this work, we present time-to-breakdown characteristics of HfO/sub 2/ under unipolar AC voltage stress MOS capacitors. It is shown that HfO/sub 2/ displays a longer lifetime under AC stress than constant voltage stress. Higher frequency and lower duty cycle in the AC stress resulted in a longer lifetime enhancement. As the thickness decreases, the amount of lifetime enhancement decreases. The enhancement of unipolar t/sub BD/ is attributed to less charge trapping during the on t/sub on/ and charge detrapping during the off time, t/sub off/. It is proposed that the characteristic time (/spl tau//sub in/) for charge to be trapped in HfO/sub 2/ is longer than t/sub on/ of unipolar stress. Also, we found a strong correlation between t/sub on/ and t/sub off/ with regard to how it leads to lifetime enhancement." @default.
• W2043443996 created "2016-06-24" @default.
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• W2043443996 date "2003-12-22" @default.
• W2043443996 modified "2023-09-28" @default.
• W2043443996 title "Dynamic reliability characteristics of ultra-thin HfO/sub 2/" @default.
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• W2043443996 doi "https://doi.org/10.1109/relphy.2003.1197719" @default.
• W2043443996 hasPublicationYear "2003" @default.
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