Matches in SemOpenAlex for { <https://semopenalex.org/work/W2043483599> ?p ?o ?g. }
Showing items 1 to 72 of
72
with 100 items per page.
- W2043483599 endingPage "918" @default.
- W2043483599 startingPage "912" @default.
- W2043483599 abstract "In this paper, we present a reusable quartz master fabricated by electron-beam lithography and the results of the preliminary test of injection molding using the reusable quartz master. Since patterned structures of photoresist can be easily damaged by demolding process of nickel stamper and master, a master with photoresist cannot be reused in stamper fabrication process. In this work, we have made it possible of the repeated use of master by directly patterning on quartz in nickel stamper fabrication process. We have developed a 100nm-pit sized reusable quartz master with intaglio carving patterns of finer sizes than those of DVD (400nm) and blue-ray disc (200nm). In the preliminary test of the injection molding, we have found optimum injection molding conditions using polypropylene." @default.
- W2043483599 created "2016-06-24" @default.
- W2043483599 creator A5003450751 @default.
- W2043483599 creator A5013947247 @default.
- W2043483599 creator A5022780804 @default.
- W2043483599 creator A5038223831 @default.
- W2043483599 date "2005-01-01" @default.
- W2043483599 modified "2023-10-16" @default.
- W2043483599 title "Nano Pattern Mold Technology Using Nano Stamper Based on Quartz" @default.
- W2043483599 cites W1965397990 @default.
- W2043483599 cites W1980674827 @default.
- W2043483599 cites W2065373578 @default.
- W2043483599 doi "https://doi.org/10.4028/www.scientific.net/kem.277-279.912" @default.
- W2043483599 hasPublicationYear "2005" @default.
- W2043483599 type Work @default.
- W2043483599 sameAs 2043483599 @default.
- W2043483599 citedByCount "0" @default.
- W2043483599 crossrefType "journal-article" @default.
- W2043483599 hasAuthorship W2043483599A5003450751 @default.
- W2043483599 hasAuthorship W2043483599A5013947247 @default.
- W2043483599 hasAuthorship W2043483599A5022780804 @default.
- W2043483599 hasAuthorship W2043483599A5038223831 @default.
- W2043483599 hasConcept C134406635 @default.
- W2043483599 hasConcept C136525101 @default.
- W2043483599 hasConcept C142724271 @default.
- W2043483599 hasConcept C159985019 @default.
- W2043483599 hasConcept C171250308 @default.
- W2043483599 hasConcept C192562407 @default.
- W2043483599 hasConcept C204223013 @default.
- W2043483599 hasConcept C204787440 @default.
- W2043483599 hasConcept C2779227376 @default.
- W2043483599 hasConcept C2779870107 @default.
- W2043483599 hasConcept C2780357685 @default.
- W2043483599 hasConcept C2780566776 @default.
- W2043483599 hasConcept C49040817 @default.
- W2043483599 hasConcept C67558686 @default.
- W2043483599 hasConcept C71924100 @default.
- W2043483599 hasConceptScore W2043483599C134406635 @default.
- W2043483599 hasConceptScore W2043483599C136525101 @default.
- W2043483599 hasConceptScore W2043483599C142724271 @default.
- W2043483599 hasConceptScore W2043483599C159985019 @default.
- W2043483599 hasConceptScore W2043483599C171250308 @default.
- W2043483599 hasConceptScore W2043483599C192562407 @default.
- W2043483599 hasConceptScore W2043483599C204223013 @default.
- W2043483599 hasConceptScore W2043483599C204787440 @default.
- W2043483599 hasConceptScore W2043483599C2779227376 @default.
- W2043483599 hasConceptScore W2043483599C2779870107 @default.
- W2043483599 hasConceptScore W2043483599C2780357685 @default.
- W2043483599 hasConceptScore W2043483599C2780566776 @default.
- W2043483599 hasConceptScore W2043483599C49040817 @default.
- W2043483599 hasConceptScore W2043483599C67558686 @default.
- W2043483599 hasConceptScore W2043483599C71924100 @default.
- W2043483599 hasLocation W20434835991 @default.
- W2043483599 hasOpenAccess W2043483599 @default.
- W2043483599 hasPrimaryLocation W20434835991 @default.
- W2043483599 hasRelatedWork W1602783151 @default.
- W2043483599 hasRelatedWork W1984158086 @default.
- W2043483599 hasRelatedWork W2023557418 @default.
- W2043483599 hasRelatedWork W2090803112 @default.
- W2043483599 hasRelatedWork W2101533454 @default.
- W2043483599 hasRelatedWork W2315337917 @default.
- W2043483599 hasRelatedWork W2596721096 @default.
- W2043483599 hasRelatedWork W2892848358 @default.
- W2043483599 hasRelatedWork W3016625011 @default.
- W2043483599 hasRelatedWork W4206427960 @default.
- W2043483599 hasVolume "277-279" @default.
- W2043483599 isParatext "false" @default.
- W2043483599 isRetracted "false" @default.
- W2043483599 magId "2043483599" @default.
- W2043483599 workType "article" @default.