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• W2043487811 abstract "Systematic investigation of the SPM oxidation process of sputter-deposited ZrN thin films is reported. During the intrinsic part of the oxidation, the density of the oxide increases until the total oxide thickness is approximately twice the feature height. Further oxide growth is sustainable as the system undergoes plastic flow followed by delamination from the ZrN–silicon interface keeping the oxide density constant. ZrN exhibits superdiffusive oxidation kinetics in these single tip SPM studies. We extend this work to the fabrication of parallel oxide patterns 70 nm in height covering areas in the square centimeter range. This simple, quick, and well-controlled parallel nanolithographic technique has great potential for biomedical template fabrication." @default.
• W2043487811 created "2016-06-24" @default.
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• W2043487811 date "2005-06-27" @default.
• W2043487811 modified "2023-09-26" @default.
• W2043487811 title "SPM oxidation and parallel writing on zirconium nitride thin films" @default.
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• W2043487811 doi "https://doi.org/10.1116/1.1864052" @default.
• W2043487811 hasPublicationYear "2005" @default.
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