Matches in SemOpenAlex for { <https://semopenalex.org/work/W2043489452> ?p ?o ?g. }
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- W2043489452 endingPage "2227" @default.
- W2043489452 startingPage "2224" @default.
- W2043489452 abstract "Image-placement control with electron-beam lithography is directly influenced by charging effects during exposure. One of the primary charging sources is the buildup of electrons in the nonconductive resist film. We have evaluated the use of a conductive-polyaniline film as a topcoat over the resist during exposure. Critical parameters including image-size variation, image placement, and defect density were compared for masks with and without the conductive-polyaniline topcoat. It was found that the performance is dependent on the resist exposure dose. For a low-sensitivity resist (i.e., a resist requiring high exposure dose), significant improvements for image size and image placement can be achieved with the implementation of a conductive topcoat. For a high-sensitivity resist (i.e., a resist requiring low exposure dose) with single-pass writing, preliminary results show that charging is currently not the primary driver of image-placement errors." @default.
- W2043489452 created "2016-06-24" @default.
- W2043489452 creator A5082893746 @default.
- W2043489452 date "1997-11-01" @default.
- W2043489452 modified "2023-10-14" @default.
- W2043489452 title "Conductive polyaniline: Applications in x-ray mask making" @default.
- W2043489452 cites W2029753889 @default.
- W2043489452 cites W2072108192 @default.
- W2043489452 cites W2081745960 @default.
- W2043489452 doi "https://doi.org/10.1116/1.589618" @default.
- W2043489452 hasPublicationYear "1997" @default.
- W2043489452 type Work @default.
- W2043489452 sameAs 2043489452 @default.
- W2043489452 citedByCount "1" @default.
- W2043489452 crossrefType "journal-article" @default.
- W2043489452 hasAuthorship W2043489452A5082893746 @default.
- W2043489452 hasConcept C120665830 @default.
- W2043489452 hasConcept C121332964 @default.
- W2043489452 hasConcept C147120987 @default.
- W2043489452 hasConcept C159985019 @default.
- W2043489452 hasConcept C171250308 @default.
- W2043489452 hasConcept C192562407 @default.
- W2043489452 hasConcept C200274948 @default.
- W2043489452 hasConcept C202374169 @default.
- W2043489452 hasConcept C204223013 @default.
- W2043489452 hasConcept C2777580120 @default.
- W2043489452 hasConcept C2779227376 @default.
- W2043489452 hasConcept C44228677 @default.
- W2043489452 hasConcept C49040817 @default.
- W2043489452 hasConcept C521977710 @default.
- W2043489452 hasConcept C53524968 @default.
- W2043489452 hasConcept C62520636 @default.
- W2043489452 hasConcept C95312477 @default.
- W2043489452 hasConceptScore W2043489452C120665830 @default.
- W2043489452 hasConceptScore W2043489452C121332964 @default.
- W2043489452 hasConceptScore W2043489452C147120987 @default.
- W2043489452 hasConceptScore W2043489452C159985019 @default.
- W2043489452 hasConceptScore W2043489452C171250308 @default.
- W2043489452 hasConceptScore W2043489452C192562407 @default.
- W2043489452 hasConceptScore W2043489452C200274948 @default.
- W2043489452 hasConceptScore W2043489452C202374169 @default.
- W2043489452 hasConceptScore W2043489452C204223013 @default.
- W2043489452 hasConceptScore W2043489452C2777580120 @default.
- W2043489452 hasConceptScore W2043489452C2779227376 @default.
- W2043489452 hasConceptScore W2043489452C44228677 @default.
- W2043489452 hasConceptScore W2043489452C49040817 @default.
- W2043489452 hasConceptScore W2043489452C521977710 @default.
- W2043489452 hasConceptScore W2043489452C53524968 @default.
- W2043489452 hasConceptScore W2043489452C62520636 @default.
- W2043489452 hasConceptScore W2043489452C95312477 @default.
- W2043489452 hasIssue "6" @default.
- W2043489452 hasLocation W20434894521 @default.
- W2043489452 hasOpenAccess W2043489452 @default.
- W2043489452 hasPrimaryLocation W20434894521 @default.
- W2043489452 hasRelatedWork W1974007283 @default.
- W2043489452 hasRelatedWork W2021670711 @default.
- W2043489452 hasRelatedWork W2035092861 @default.
- W2043489452 hasRelatedWork W2053759064 @default.
- W2043489452 hasRelatedWork W2060218775 @default.
- W2043489452 hasRelatedWork W2061137097 @default.
- W2043489452 hasRelatedWork W2068984851 @default.
- W2043489452 hasRelatedWork W2088280212 @default.
- W2043489452 hasRelatedWork W2092404174 @default.
- W2043489452 hasRelatedWork W2381201749 @default.
- W2043489452 hasVolume "15" @default.
- W2043489452 isParatext "false" @default.
- W2043489452 isRetracted "false" @default.
- W2043489452 magId "2043489452" @default.
- W2043489452 workType "article" @default.