Matches in SemOpenAlex for { <https://semopenalex.org/work/W2043574064> ?p ?o ?g. }
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- W2043574064 endingPage "013003" @default.
- W2043574064 startingPage "013003" @default.
- W2043574064 abstract "For lithography of 45-nm half-pitch and beyond, the resist blur due to photoacid diffusion is a significant issue. On the other hand, it has been generally recognized that there is a trade-off between resist resolution and sensitivity. We study the influence of the resist blur on resolution in hypernumerical aperture ArF immersion lithography by utilizing a two-beam interferometric exposure tool. We evaluated the current photoresist performance for some of the latest commercial resists and estimated their acid diffusion lengths as 8 nm to 9 nm in sigma assuming Gaussian blur kernel. In addition, we found that the acid diffusion length, which is directly related to the resist resolution and is controllable by photoacid generator (PAG) anion size, polymer resin size, and post-exposure bake (PEB) temperature. We confirmed that there is a trade-off between resist resolution and sensitivity. Our results indicate that the resist blur is still a concern in order to extend lithography for 45 nm and beyond; however, it will not likely be a showstopper. We consider that total optimization of resists and exposure tools is important in order to achieve ultimate resolution in hyper-NA immersion lithography." @default.
- W2043574064 created "2016-06-24" @default.
- W2043574064 creator A5009813660 @default.
- W2043574064 creator A5010354791 @default.
- W2043574064 creator A5028904521 @default.
- W2043574064 creator A5035468212 @default.
- W2043574064 creator A5042301565 @default.
- W2043574064 creator A5047494413 @default.
- W2043574064 creator A5073995416 @default.
- W2043574064 creator A5090157787 @default.
- W2043574064 date "2009-01-01" @default.
- W2043574064 modified "2023-09-25" @default.
- W2043574064 title "Influence of resist blur on resolution of hyper-NA immersion lithography beyond <inline-formula><math display=inline overflow=scroll><mrow><mn>45</mn><mtext>-</mtext><mi>nm</mi></mrow></math></inline-formula> half-pitch" @default.
- W2043574064 cites W1974564032 @default.
- W2043574064 cites W1979668638 @default.
- W2043574064 cites W1994669266 @default.
- W2043574064 cites W2014038471 @default.
- W2043574064 cites W2033719210 @default.
- W2043574064 cites W2052379952 @default.
- W2043574064 cites W2076968910 @default.
- W2043574064 cites W2085439548 @default.
- W2043574064 cites W2140926846 @default.
- W2043574064 cites W2751714018 @default.
- W2043574064 cites W4230671431 @default.
- W2043574064 doi "https://doi.org/10.1117/1.3059551" @default.
- W2043574064 hasPublicationYear "2009" @default.
- W2043574064 type Work @default.
- W2043574064 sameAs 2043574064 @default.
- W2043574064 citedByCount "0" @default.
- W2043574064 crossrefType "journal-article" @default.
- W2043574064 hasAuthorship W2043574064A5009813660 @default.
- W2043574064 hasAuthorship W2043574064A5010354791 @default.
- W2043574064 hasAuthorship W2043574064A5028904521 @default.
- W2043574064 hasAuthorship W2043574064A5035468212 @default.
- W2043574064 hasAuthorship W2043574064A5042301565 @default.
- W2043574064 hasAuthorship W2043574064A5047494413 @default.
- W2043574064 hasAuthorship W2043574064A5073995416 @default.
- W2043574064 hasAuthorship W2043574064A5090157787 @default.
- W2043574064 hasConcept C104317376 @default.
- W2043574064 hasConcept C106430172 @default.
- W2043574064 hasConcept C115961682 @default.
- W2043574064 hasConcept C120665830 @default.
- W2043574064 hasConcept C121332964 @default.
- W2043574064 hasConcept C134406635 @default.
- W2043574064 hasConcept C138268822 @default.
- W2043574064 hasConcept C154945302 @default.
- W2043574064 hasConcept C171250308 @default.
- W2043574064 hasConcept C192562407 @default.
- W2043574064 hasConcept C200274948 @default.
- W2043574064 hasConcept C204223013 @default.
- W2043574064 hasConcept C2779227376 @default.
- W2043574064 hasConcept C41008148 @default.
- W2043574064 hasConcept C49040817 @default.
- W2043574064 hasConcept C53524968 @default.
- W2043574064 hasConcept C9417928 @default.
- W2043574064 hasConcept C94263209 @default.
- W2043574064 hasConceptScore W2043574064C104317376 @default.
- W2043574064 hasConceptScore W2043574064C106430172 @default.
- W2043574064 hasConceptScore W2043574064C115961682 @default.
- W2043574064 hasConceptScore W2043574064C120665830 @default.
- W2043574064 hasConceptScore W2043574064C121332964 @default.
- W2043574064 hasConceptScore W2043574064C134406635 @default.
- W2043574064 hasConceptScore W2043574064C138268822 @default.
- W2043574064 hasConceptScore W2043574064C154945302 @default.
- W2043574064 hasConceptScore W2043574064C171250308 @default.
- W2043574064 hasConceptScore W2043574064C192562407 @default.
- W2043574064 hasConceptScore W2043574064C200274948 @default.
- W2043574064 hasConceptScore W2043574064C204223013 @default.
- W2043574064 hasConceptScore W2043574064C2779227376 @default.
- W2043574064 hasConceptScore W2043574064C41008148 @default.
- W2043574064 hasConceptScore W2043574064C49040817 @default.
- W2043574064 hasConceptScore W2043574064C53524968 @default.
- W2043574064 hasConceptScore W2043574064C9417928 @default.
- W2043574064 hasConceptScore W2043574064C94263209 @default.
- W2043574064 hasIssue "1" @default.
- W2043574064 hasLocation W20435740641 @default.
- W2043574064 hasOpenAccess W2043574064 @default.
- W2043574064 hasPrimaryLocation W20435740641 @default.
- W2043574064 hasRelatedWork W1974313763 @default.
- W2043574064 hasRelatedWork W1999981161 @default.
- W2043574064 hasRelatedWork W2006403989 @default.
- W2043574064 hasRelatedWork W2013625679 @default.
- W2043574064 hasRelatedWork W2043574064 @default.
- W2043574064 hasRelatedWork W2043777656 @default.
- W2043574064 hasRelatedWork W1965928302 @default.
- W2043574064 hasRelatedWork W1970879150 @default.
- W2043574064 hasRelatedWork W2018780667 @default.
- W2043574064 hasRelatedWork W3149573858 @default.
- W2043574064 hasVolume "8" @default.
- W2043574064 isParatext "false" @default.
- W2043574064 isRetracted "false" @default.
- W2043574064 magId "2043574064" @default.
- W2043574064 workType "article" @default.