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- W2043621706 abstract "The isotopic composition of the flux of sputtered neutrals was monitored for very low primary beam fluences (ensuremath{lesssim}1ifmmodetimeselsetexttimesfi{}${10}^{15}$ ${mathrm{Ar}}^{+}$ ions/${mathrm{cm}}^{2}$) and different emission angles (0ifmmode^circelsetextdegreefi{} to 60ifmmode^circelsetextdegreefi{}) by means of secondary neutral mass spectrometry. Initially, the emitted material is enriched in the lighter isotopes by a factor of about 1.05 for $^{70}mathrm{Ge}$${/}^{76}$Ge and $^{92}mathrm{Mo}$${/}^{100}$Mo. This initial enrichment is independent of the emission angle and gradually decreases during sample erosion. A steady-state value is reached upon sputter removal of a layer of roughly 15 nm." @default.
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- W2043621706 date "1989-12-11" @default.
- W2043621706 modified "2023-09-25" @default.
- W2043621706 title "Preferential sputtering of isotopes: Fluence and emission-angle dependence" @default.
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- W2043621706 doi "https://doi.org/10.1103/physrevlett.63.2673" @default.
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