Matches in SemOpenAlex for { <https://semopenalex.org/work/W2043660699> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2043660699 abstract "The proximity printing industry is in real need of high resolution results and it can be done using Phase Shift Mask (PSM) or by applying Optical Proximity Correction (OPC). In our research we are trying to find out details of how light fields behind the structures of photo masks develop in order to determine the best conditions and designs for proximity printing. We focus here on parameters that are used in real situation with gaps up to 50 μm and structure sizes down to 2 μm. The light field evolution behind the structures is studied and delivers insight in to precisions and tolerances that need to be respected. It is the first time that an experimental analysis of light propagation through mask is presented in detail, which includes information on intensity and phase. The instrument we use is known as High Resolution Interference Microscopy (HRIM). HRIM is a Mach-Zehnder interferometer which is capable of recording three dimensional distributions of intensity and phase with diffraction limited resolution. Our characterization technique allows plotting the evolution of the desired light field and therefore printable structure till the desired proximity gap. In this paper we discuss in detail the evolution of intensity and phase fields of elbow or corner structure at different position behind a phase mask and interpret the main parameters. Of particular interest are tolerances against proximity gap variation and the resolution in printed structures." @default.
- W2043660699 created "2016-06-24" @default.
- W2043660699 creator A5007561365 @default.
- W2043660699 creator A5007755364 @default.
- W2043660699 creator A5040673211 @default.
- W2043660699 creator A5043801104 @default.
- W2043660699 creator A5046008432 @default.
- W2043660699 creator A5050032922 @default.
- W2043660699 creator A5081053852 @default.
- W2043660699 date "2015-03-18" @default.
- W2043660699 modified "2023-10-03" @default.
- W2043660699 title "Intensity and phase fields behind Phase Shifting Masks studied with High Resolution Interference Microscopy" @default.
- W2043660699 cites W1501261314 @default.
- W2043660699 cites W1594489858 @default.
- W2043660699 cites W1971679740 @default.
- W2043660699 cites W2002923469 @default.
- W2043660699 cites W2062623692 @default.
- W2043660699 cites W2071455626 @default.
- W2043660699 cites W2151703212 @default.
- W2043660699 cites W4230668269 @default.
- W2043660699 doi "https://doi.org/10.1117/12.2085804" @default.
- W2043660699 hasPublicationYear "2015" @default.
- W2043660699 type Work @default.
- W2043660699 sameAs 2043660699 @default.
- W2043660699 citedByCount "2" @default.
- W2043660699 countsByYear W20436606992015 @default.
- W2043660699 countsByYear W20436606992016 @default.
- W2043660699 crossrefType "proceedings-article" @default.
- W2043660699 hasAuthorship W2043660699A5007561365 @default.
- W2043660699 hasAuthorship W2043660699A5007755364 @default.
- W2043660699 hasAuthorship W2043660699A5040673211 @default.
- W2043660699 hasAuthorship W2043660699A5043801104 @default.
- W2043660699 hasAuthorship W2043660699A5046008432 @default.
- W2043660699 hasAuthorship W2043660699A5050032922 @default.
- W2043660699 hasAuthorship W2043660699A5081053852 @default.
- W2043660699 hasBestOaLocation W20436606992 @default.
- W2043660699 hasConcept C105487726 @default.
- W2043660699 hasConcept C120665830 @default.
- W2043660699 hasConcept C121332964 @default.
- W2043660699 hasConcept C127162648 @default.
- W2043660699 hasConcept C138268822 @default.
- W2043660699 hasConcept C152194808 @default.
- W2043660699 hasConcept C154945302 @default.
- W2043660699 hasConcept C166689943 @default.
- W2043660699 hasConcept C192209626 @default.
- W2043660699 hasConcept C205372480 @default.
- W2043660699 hasConcept C207114421 @default.
- W2043660699 hasConcept C3020368824 @default.
- W2043660699 hasConcept C32022120 @default.
- W2043660699 hasConcept C41008148 @default.
- W2043660699 hasConcept C44280652 @default.
- W2043660699 hasConcept C48983235 @default.
- W2043660699 hasConcept C62520636 @default.
- W2043660699 hasConcept C76155785 @default.
- W2043660699 hasConcept C78371743 @default.
- W2043660699 hasConcept C93038891 @default.
- W2043660699 hasConceptScore W2043660699C105487726 @default.
- W2043660699 hasConceptScore W2043660699C120665830 @default.
- W2043660699 hasConceptScore W2043660699C121332964 @default.
- W2043660699 hasConceptScore W2043660699C127162648 @default.
- W2043660699 hasConceptScore W2043660699C138268822 @default.
- W2043660699 hasConceptScore W2043660699C152194808 @default.
- W2043660699 hasConceptScore W2043660699C154945302 @default.
- W2043660699 hasConceptScore W2043660699C166689943 @default.
- W2043660699 hasConceptScore W2043660699C192209626 @default.
- W2043660699 hasConceptScore W2043660699C205372480 @default.
- W2043660699 hasConceptScore W2043660699C207114421 @default.
- W2043660699 hasConceptScore W2043660699C3020368824 @default.
- W2043660699 hasConceptScore W2043660699C32022120 @default.
- W2043660699 hasConceptScore W2043660699C41008148 @default.
- W2043660699 hasConceptScore W2043660699C44280652 @default.
- W2043660699 hasConceptScore W2043660699C48983235 @default.
- W2043660699 hasConceptScore W2043660699C62520636 @default.
- W2043660699 hasConceptScore W2043660699C76155785 @default.
- W2043660699 hasConceptScore W2043660699C78371743 @default.
- W2043660699 hasConceptScore W2043660699C93038891 @default.
- W2043660699 hasLocation W20436606991 @default.
- W2043660699 hasLocation W20436606992 @default.
- W2043660699 hasOpenAccess W2043660699 @default.
- W2043660699 hasPrimaryLocation W20436606991 @default.
- W2043660699 hasRelatedWork W1983999302 @default.
- W2043660699 hasRelatedWork W2009740676 @default.
- W2043660699 hasRelatedWork W2024006036 @default.
- W2043660699 hasRelatedWork W2058234589 @default.
- W2043660699 hasRelatedWork W2076403196 @default.
- W2043660699 hasRelatedWork W2120400380 @default.
- W2043660699 hasRelatedWork W2260530752 @default.
- W2043660699 hasRelatedWork W2576118494 @default.
- W2043660699 hasRelatedWork W2606100131 @default.
- W2043660699 hasRelatedWork W4284988287 @default.
- W2043660699 isParatext "false" @default.
- W2043660699 isRetracted "false" @default.
- W2043660699 magId "2043660699" @default.
- W2043660699 workType "article" @default.