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- W2043662406 abstract "Abstract Growth and structural evolution of La 0.5 Sr 0.5 CoO 3 thin films fabricated directly on SiO 2 /Si substrate by pulsed laser deposition were investigated. Films deposited at 780 °C and oxygen partial pressure of 2 Pa showed highly c -axis orientation. Films with low electrical resistivity of 2 × 10 − 3 Ω cm were obtained by annealing at 650 °C for 40 min. C -axis oriented Ba 0.5 Sr 0.5 TiO 3 thin film was then grown on the La 0.5 Sr 0.5 CoO 3 film, and large dielectric tuning (> 50%) was achieved. This method may have good prospect for the integration of ferroelectric materials with conventional Si process technology." @default.
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- W2043662406 date "2006-02-01" @default.
- W2043662406 modified "2023-09-27" @default.
- W2043662406 title "Growth of (001) oriented La0.5Sr0.5CoO3 films directly on SiO2/Si substrate by pulsed laser deposition" @default.
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- W2043662406 doi "https://doi.org/10.1016/j.tsf.2005.10.002" @default.
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