Matches in SemOpenAlex for { <https://semopenalex.org/work/W2043665639> ?p ?o ?g. }
Showing items 1 to 68 of
68
with 100 items per page.
- W2043665639 endingPage "1949" @default.
- W2043665639 startingPage "1944" @default.
- W2043665639 abstract "Low-voltage scanning electron microscopes (SEM’s) are primarily used for submicron metrology and inspection of resist images and other processing levels in the fabrication of integrated circuits. The optical confocal laser scanning microscope (CLSM) has recently been introduced as another system for submicron metrology. In this paper, the important issues of submicron resist metrology are investigated. It is shown that SEM based metrology systems can be used to measure the top widths of 0.5-μm-thick resist features with an accuracy of 0.02 μm or better, down to ∼0.1 μm, the smallest pattern used in this study. The measurement precision of the SEM was actually better than 0.015 μm, 3σ. The precision was found to be influenced by charging effects and the quality of the SEM signal. The 325-nm wavelength CLSM was able to make measurements of similar accuracy down to 0.5–0.35 μm using a careful choice of focus height and measurement threshold. Changing the substrate from Si to 0.27-μm oxide/Si resulted in a significant change in the measurement offset for the CLSM, but had little effect on the SEM measurements. The measurement precision of the CLSM was typically below 0.025 μm, 3σ. The CLSM precision was influenced by small variations in focus height. The accuracy and precision of both systems were dependent on the correct utilization of the measurement algorithms and careful calibration of the measurement signals." @default.
- W2043665639 created "2016-06-24" @default.
- W2043665639 creator A5047690224 @default.
- W2043665639 date "1988-11-01" @default.
- W2043665639 modified "2023-10-18" @default.
- W2043665639 title "Measurement techniques for submicron resist images" @default.
- W2043665639 doi "https://doi.org/10.1116/1.584138" @default.
- W2043665639 hasPublicationYear "1988" @default.
- W2043665639 type Work @default.
- W2043665639 sameAs 2043665639 @default.
- W2043665639 citedByCount "8" @default.
- W2043665639 crossrefType "journal-article" @default.
- W2043665639 hasAuthorship W2043665639A5047690224 @default.
- W2043665639 hasConcept C120665830 @default.
- W2043665639 hasConcept C121332964 @default.
- W2043665639 hasConcept C136525101 @default.
- W2043665639 hasConcept C137209882 @default.
- W2043665639 hasConcept C142724271 @default.
- W2043665639 hasConcept C165838908 @default.
- W2043665639 hasConcept C171250308 @default.
- W2043665639 hasConcept C192209626 @default.
- W2043665639 hasConcept C192562407 @default.
- W2043665639 hasConcept C195766429 @default.
- W2043665639 hasConcept C202799725 @default.
- W2043665639 hasConcept C204787440 @default.
- W2043665639 hasConcept C26771246 @default.
- W2043665639 hasConcept C2779227376 @default.
- W2043665639 hasConcept C53524968 @default.
- W2043665639 hasConcept C62520636 @default.
- W2043665639 hasConcept C71924100 @default.
- W2043665639 hasConceptScore W2043665639C120665830 @default.
- W2043665639 hasConceptScore W2043665639C121332964 @default.
- W2043665639 hasConceptScore W2043665639C136525101 @default.
- W2043665639 hasConceptScore W2043665639C137209882 @default.
- W2043665639 hasConceptScore W2043665639C142724271 @default.
- W2043665639 hasConceptScore W2043665639C165838908 @default.
- W2043665639 hasConceptScore W2043665639C171250308 @default.
- W2043665639 hasConceptScore W2043665639C192209626 @default.
- W2043665639 hasConceptScore W2043665639C192562407 @default.
- W2043665639 hasConceptScore W2043665639C195766429 @default.
- W2043665639 hasConceptScore W2043665639C202799725 @default.
- W2043665639 hasConceptScore W2043665639C204787440 @default.
- W2043665639 hasConceptScore W2043665639C26771246 @default.
- W2043665639 hasConceptScore W2043665639C2779227376 @default.
- W2043665639 hasConceptScore W2043665639C53524968 @default.
- W2043665639 hasConceptScore W2043665639C62520636 @default.
- W2043665639 hasConceptScore W2043665639C71924100 @default.
- W2043665639 hasIssue "6" @default.
- W2043665639 hasLocation W20436656391 @default.
- W2043665639 hasOpenAccess W2043665639 @default.
- W2043665639 hasPrimaryLocation W20436656391 @default.
- W2043665639 hasRelatedWork W1980429525 @default.
- W2043665639 hasRelatedWork W2013007037 @default.
- W2043665639 hasRelatedWork W2020700911 @default.
- W2043665639 hasRelatedWork W2043665639 @default.
- W2043665639 hasRelatedWork W2046302606 @default.
- W2043665639 hasRelatedWork W2050419949 @default.
- W2043665639 hasRelatedWork W2056391764 @default.
- W2043665639 hasRelatedWork W2390498998 @default.
- W2043665639 hasRelatedWork W2563111101 @default.
- W2043665639 hasRelatedWork W2952350769 @default.
- W2043665639 hasVolume "6" @default.
- W2043665639 isParatext "false" @default.
- W2043665639 isRetracted "false" @default.
- W2043665639 magId "2043665639" @default.
- W2043665639 workType "article" @default.