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- W2043978013 abstract "In this work we have investigated the feasibility of atmospheric pressure chemical vapor deposition of phosphorus and boron doped silicon oxides from a liquid source—namely TMP (tri-methyl-phosphite)—an alternative to phosphine as a P dopant source'. The most important results on process characterization, dopant incorporation, and film properties are presented. In addition to the easy operation of the liquid source, a remarkable improvement in step coverage has been found, in comparison with PSG deposition from conventional silane and phosphine chemistry." @default.
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- W2043978013 date "1990-03-01" @default.
- W2043978013 modified "2023-09-27" @default.
- W2043978013 title "Doped SiO2deposition from TMP in APCVD" @default.
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- W2043978013 doi "https://doi.org/10.1002/ett.4460010215" @default.
- W2043978013 hasPublicationYear "1990" @default.
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