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- W2043983106 abstract "The basic operation, advantages, and limitations of the scanning electron microscope are discussed. In applications the high magnification and large depth of field capabilities of the SEM are shown to aid in evaluating surface features such as metallization and wire bonds. Examples of both dynamic and static voltage contrast displays illustrate the localization of defects in integrated circuits. The electron beam induced current mode is used to detect sub-surface defects in discrete devices." @default.
- W2043983106 created "2016-06-24" @default.
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- W2043983106 date "1973-04-01" @default.
- W2043983106 modified "2023-09-27" @default.
- W2043983106 title "Failure Analysis Applications of the Scanning Electron Microscope" @default.
- W2043983106 doi "https://doi.org/10.1109/irps.1973.362592" @default.
- W2043983106 hasPublicationYear "1973" @default.
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