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- W2044008889 abstract "The results are given of the construction of a high-power excimer laser capable of generating λ = 308-nm radiation with an average power of ~ 600 W. The laser power supply system was based on four commercial thyratrons and a magnetic switch. As an example of an application of such a laser, the results are given of the formation of a structure of apertures in polyimide deposited on aluminum. A binary film of this type serves as a flexible substrate used to mount large-scale integrated circuits." @default.
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- W2044008889 date "1991-02-28" @default.
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- W2044008889 title "Pulse-periodic 600-W XeCl laser for industrial applications" @default.
- W2044008889 doi "https://doi.org/10.1070/qe1991v021n02abeh003742" @default.
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