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• W2044152181 abstract "Electrodeposited LIGA Ni microtensile specimens, representative of microelectromechanical systems components, have been vapor-phase aluminized with a process traditionally used to make diffusion aluminide coatings. Subsequent heat treatments resulted in homogenization of Al throughout the specimens and production of a precipitation-strengthened (γ-Ni + γ′-Ni3Al) microstructure. The thermal stability and strength of these components represent a significant improvement over traditional LIGA Ni materials. Microprobe analysis points to the importance of composition in determining strength and ductility of these materials." @default.
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• W2044152181 date "2012-09-01" @default.
• W2044152181 modified "2023-10-16" @default.
• W2044152181 title "Development of Ni-based superalloys for microelectromechanical systems" @default.
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• W2044152181 doi "https://doi.org/10.1016/j.scriptamat.2012.06.003" @default.
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