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- W2044209580 abstract "A new spectroscopic phase modulated ellipsometer (SPME) is presented. As compared to other ellipsometric techniques like rotating analyzer ellipsometry (RAE), the phase modulation uses a high frequency modulation (50 kHz) provided by a photoelastic modulator. Then SPME allows at least two orders of magnitude faster real-time mesurements than RAE. Thus, SPME is particularly suitable for in situ real-time applications. New insights on phase modulated ellipsometry are given. In particular, it is shown that an optical model, taking into account the presence of higher harmonics in the modulation, leads to an improvement of the precision measurement. Therefore, it can be inferred that both RAE and SPME provide comparable high precision measurements. Moreover SPME can be combined with numerical data processing systems. A new Fourier analysis of the signal, based on the use of a high precision analog digital converter and a fast digital processor, is presented. The adaptation of the SPME to a deposition chamber is illustrated. In particular, the use of optical fibers in both optical arms allows an increase of the compactness of the ellipsometer. Four detectors can be used simultaneously providing the spectroscopic capability for real-time applications. On-line connexions between the data acquisition system and external analog signals and triggers can also be used. Thus phase modulated ellipsometry appears a powerful technique for in situ control processing applications." @default.
- W2044209580 created "2016-06-24" @default.
- W2044209580 creator A5008126174 @default.
- W2044209580 creator A5030038613 @default.
- W2044209580 creator A5045177476 @default.
- W2044209580 creator A5067440332 @default.
- W2044209580 creator A5073936135 @default.
- W2044209580 creator A5080494667 @default.
- W2044209580 date "1990-02-15" @default.
- W2044209580 modified "2023-09-23" @default.
- W2044209580 title "Design Of A New In Situ Spectroscopic Phase Modulated Ellipsometer" @default.
- W2044209580 doi "https://doi.org/10.1117/12.963951" @default.
- W2044209580 hasPublicationYear "1990" @default.
- W2044209580 type Work @default.
- W2044209580 sameAs 2044209580 @default.
- W2044209580 citedByCount "20" @default.
- W2044209580 crossrefType "proceedings-article" @default.
- W2044209580 hasAuthorship W2044209580A5008126174 @default.
- W2044209580 hasAuthorship W2044209580A5030038613 @default.
- W2044209580 hasAuthorship W2044209580A5045177476 @default.
- W2044209580 hasAuthorship W2044209580A5067440332 @default.
- W2044209580 hasAuthorship W2044209580A5073936135 @default.
- W2044209580 hasAuthorship W2044209580A5080494667 @default.
- W2044209580 hasConcept C120665830 @default.
- W2044209580 hasConcept C121332964 @default.
- W2044209580 hasConcept C123079801 @default.
- W2044209580 hasConcept C158007255 @default.
- W2044209580 hasConcept C165801399 @default.
- W2044209580 hasConcept C171250308 @default.
- W2044209580 hasConcept C18293161 @default.
- W2044209580 hasConcept C188414643 @default.
- W2044209580 hasConcept C19067145 @default.
- W2044209580 hasConcept C192562407 @default.
- W2044209580 hasConcept C24890656 @default.
- W2044209580 hasConcept C41008148 @default.
- W2044209580 hasConcept C62520636 @default.
- W2044209580 hasConcept C89631360 @default.
- W2044209580 hasConcept C96834759 @default.
- W2044209580 hasConceptScore W2044209580C120665830 @default.
- W2044209580 hasConceptScore W2044209580C121332964 @default.
- W2044209580 hasConceptScore W2044209580C123079801 @default.
- W2044209580 hasConceptScore W2044209580C158007255 @default.
- W2044209580 hasConceptScore W2044209580C165801399 @default.
- W2044209580 hasConceptScore W2044209580C171250308 @default.
- W2044209580 hasConceptScore W2044209580C18293161 @default.
- W2044209580 hasConceptScore W2044209580C188414643 @default.
- W2044209580 hasConceptScore W2044209580C19067145 @default.
- W2044209580 hasConceptScore W2044209580C192562407 @default.
- W2044209580 hasConceptScore W2044209580C24890656 @default.
- W2044209580 hasConceptScore W2044209580C41008148 @default.
- W2044209580 hasConceptScore W2044209580C62520636 @default.
- W2044209580 hasConceptScore W2044209580C89631360 @default.
- W2044209580 hasConceptScore W2044209580C96834759 @default.
- W2044209580 hasLocation W20442095801 @default.
- W2044209580 hasOpenAccess W2044209580 @default.
- W2044209580 hasPrimaryLocation W20442095801 @default.
- W2044209580 hasRelatedWork W1995216939 @default.
- W2044209580 hasRelatedWork W2012318706 @default.
- W2044209580 hasRelatedWork W2043075483 @default.
- W2044209580 hasRelatedWork W2047179169 @default.
- W2044209580 hasRelatedWork W2057301101 @default.
- W2044209580 hasRelatedWork W2066826478 @default.
- W2044209580 hasRelatedWork W2077862357 @default.
- W2044209580 hasRelatedWork W2094789774 @default.
- W2044209580 hasRelatedWork W2146118224 @default.
- W2044209580 hasRelatedWork W2462730689 @default.
- W2044209580 isParatext "false" @default.
- W2044209580 isRetracted "false" @default.
- W2044209580 magId "2044209580" @default.
- W2044209580 workType "article" @default.