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• W2044327730 abstract "A Monte Carlo computer simulation code has been developed to describe the behavior of incident particles and the growth of (TiMo) N films in the multicomponent ion beam enhanced deposition process, which combines bombardment with a multicomponent ion beam of N++Mo+ and sputter deposition of a Ti film. The film composition profile and intermixed layer between the substrate and the film were studied using a computer simulation method. It is shown that Mo ion implantation has a stronger mixing effect in the film–substrate interface than does N ion implantation. The N profile of the computer simulation conforms to that of the Auger electron spectroscopy results." @default.
• W2044327730 created "2016-06-24" @default.
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• W2044327730 date "1998-11-01" @default.
• W2044327730 modified "2023-09-23" @default.
• W2044327730 title "Computer simulation of multicomponent ion beam enhanced deposition of (TiMo) N films" @default.
• W2044327730 cites W2024172140 @default.
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• W2044327730 doi "https://doi.org/10.1016/s0257-8972(98)00511-8" @default.
• W2044327730 hasPublicationYear "1998" @default.
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