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- W2044330005 abstract "X-ray diffraction was used to analyse coatings that had been deposited onto various substrates by a physical vapour deposition process known as sputter ion plating. To gain an overall picture for the evolution of coating microstructure with deposition time and substrate material, several aspects of X-ray diffraction were utilized: lattice parameter determination, line broadening studies, texture (preferred orientation) analysis and residual stress measurements. The lattice distortions observed were resolved into three types: macrostrain, microstrain and pseudo-macrostrain, defined as Types I, II and III respectively. Type I distortions are due to internal stress present in a thin film and this varies with the substrate material and coating density. Based on a simple biaxial stress analysis, it was shown that for titanium nitride coatings this stress consists of two components, one thermal and the other structural in origin. Ananlysis of the residual stress distribution was extended to include the effects of shear stresses and stress gradients. Results are presented which illustrate the errors which may be introduced into the values of the principal stresses σ11 and σ22 by assuming a biaxial stress distribution. The paper then goes on to a description of the origins of Type II and Type III distortions and how these relate to coating microstructure." @default.
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- W2044330005 date "1989-02-01" @default.
- W2044330005 modified "2023-10-14" @default.
- W2044330005 title "X-ray diffraction studies of physically vapour-deposited coatings" @default.
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- W2044330005 doi "https://doi.org/10.1016/0257-8972(89)90124-2" @default.
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